Dr. Sergiu Langa
at Fraunhofer IPMS
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Microelectromechanical systems, Actuators, Capacitors, Silicon, Complex systems, Solids, Differential equations, Finite element methods, Acoustics

Proceedings Article | 21 March 2018 Presentation + Paper
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Mirrors, Glasses, Semiconducting wafers, Protactinium

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Electrodes, Silicon, Transducers, Aluminum, Field emission displays, Semiconducting wafers, Surface micromachining

Proceedings Article | 9 March 2013 Paper
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Glasses, Interfaces, Silicon, Micromirrors, Semiconducting wafers, Wafer bonding, Laser bonding

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