Dr. Sergiy Yulin
at Fraunhofer IOF
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Mirrors, Reflectivity, Multilayers, Interfaces, Lanthanum, Lithography, Extreme ultraviolet lithography, Diffusion, Optical properties, Annealing

Proceedings Article | 1 April 2013 Paper
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Optical coatings, Light sources, EUV optics, Tin

Proceedings Article | 13 September 2012 Paper
Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
KEYWORDS: Optical coatings, Reflectivity, Silver, Mirrors, Metals, Polishing, Optics manufacturing, Reflectors, Astronomy, Amorphous silicon

Proceedings Article | 23 March 2012 Paper
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, EUV optics, Light sources, Plasma, Extreme ultraviolet lithography, Light scattering

Proceedings Article | 19 May 2011 Paper
Proc. SPIE. 8077, Damage to VUV, EUV, and X-ray Optics III
KEYWORDS: Extreme ultraviolet lithography, Carbon, Extreme ultraviolet, Contamination, Reflectivity, Mirrors, EUV optics, Gases, Synchrotron radiation, Wafer-level optics

Showing 5 of 40 publications
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