Mr. Serhat Sakarya Profile

Serhat Sakarya

at Technische Univ Delft

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 24 January 2004 Paper

Paper

Silicon micro-optics for smart light control

Gleb Vdovin, Davies de Lima Monteiro, Ourang Akhzar-Mehr, Mikhail Loktev, Serhat Sakarya, Oleg Soloviev, Pasqualina Sarro

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.532482

KEYWORDS: Silicon, Liquid crystals, Wavefronts, Wavefront sensors, Etching, Micromachined deformable membrane mirrors, Mirrors, Microlens array, Sensors, Actuators

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Proceedings Article | 8 July 2003 Paper

Paper

Technology of spatial light modulators based on viscoelastic layers

Serhat Sakarya, Gleb Vdovin, Lina Sarro

Proceedings Volume 5036, (2003) https://doi.org/10.1117/12.498467

KEYWORDS: Etching, Silicon, Electrodes, Semiconducting wafers, Modulation, Dielectrics, Metals, Modulators, Reflectivity, Spatial light modulators

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Proceedings Article | 3 April 2003 Paper

Paper

Fabrication technology for micromachined spatial light modulators

Serhat Sakarya, Gleb Vdovin, Pasqualina Sarro

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.472009

KEYWORDS: Electrodes, Etching, Aluminum, Silicon, Modulators, Reflectivity, Scattering, Modulation, Adhesives, Photography

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Proceedings Article | 20 January 2003 Paper

Paper

Technological approaches for fabrication of elastomer-based spatial light modulators

Serhat Sakarya, Gleb Vdovin, Pasqualina Sarro

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477804

KEYWORDS: Electrodes, Etching, Silicon, Metals, Aluminum, Modulation, Projection systems, Gold, Scattering, Oxides

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Proceedings Article | 6 November 2002 Paper

Paper

Low-cost technological approaches to micromachined spatial light modulators

Serhat Sakarya, Gleb Vdovin, Pasqualina Sarro

Proceedings Volume 4825, (2002) https://doi.org/10.1117/12.453882

KEYWORDS: Etching, Silicon, Electrodes, Aluminum, Semiconducting wafers, Modulation, Metals, Reflectivity, Photography, Polishing

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Proceedings Article | 1 February 2002 Paper

Paper

Technology for integrated spatial light modulators based on reflective membranes

Serhat Sakarya, Gleb Vdovin, Pasqualina Sarro

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454711

KEYWORDS: Electrodes, Reflectivity, Modulation, Silicon, Etching, Photoresist materials, Metals, Coating, Thin film coatings, Spatial light modulators

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Proceedings Article | 3 November 1999 Paper

Paper

Micromachined SLM based on pixelated reflective membranes

Serhat Sakarya, Gleb Vdovin, Pasqualina Sarro

Proceedings Volume 3760, (1999) https://doi.org/10.1117/12.367598

KEYWORDS: Reflectivity, Spatial light modulators, Electronics, Modulation, Control systems, Aluminum, Photoresist materials, Modulators, Silicon, Electrodes

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Showing 5 of 7 publications

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