Mr. Seunggun Byoun Profile

Seunggun Byoun

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Publications (1)

Proceedings Article | 17 March 2021 Presentation + Paper

Machine learning aided process control: critical dimension uniformity control of etching process in 1z nm DRAM

Taeyong Jo, Insoo Choi, Doocheol Choi, Yoonsung Bae, Seunggun Byoun, Inho Kim, Sukwon Lee, Changhoon Choi, Euiseok Kum, Youngil Kang, Taejoong Kim, Youngjoo Lee

Proceedings Volume 11611, 116111L (2021) https://doi.org/10.1117/12.2583473

KEYWORDS: Process control, Etching, Machine learning, Semiconductors, Cadmium, Temperature metrology, Semiconducting wafers, Neural networks, Metrology, Artificial neural networks

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