Seung Weon Paek
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Electronics, Data modeling, Manufacturing, Computer simulations, Feature extraction, Neural networks, Design for manufacturing, Machine learning, Design for manufacturability

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Phase modulation, Visualization, Manufacturing, Design for manufacturing, Image classification, Yield improvement, Process modeling, Land mines, Library classification systems

Proceedings Article | 15 March 2012 Paper
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Photovoltaics, Metals, Image processing, 3D modeling, Scanning electron microscopy, Design for manufacturing, Optical proximity correction, Semiconducting wafers, Process modeling, Chemical mechanical planarization

Proceedings Article | 15 March 2012 Paper
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Polishing, Logic, Metals, Silicon, Manufacturing, Design for manufacturing, Optical proximity correction, Failure analysis, Yield improvement, Back end of line

Showing 5 of 15 publications
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