Mr. Severin Waldis Profile

Severin Waldis

at Carl Zeiss SMT GmbH

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 21 November 2017 Open Access

MOEMs devices designed and tested for future astronomical instrumentation in space

Frédéric Zamkotsian, Patrick Lanzoni, Severin Waldis, Wilfried Noell, Veronique Conedera, Norbert Fabre, Thierry Viard, Christophe Buisset

Proceedings Volume 10566, 1056608 (2017) https://doi.org/10.1117/12.2308190

KEYWORDS: Mirrors, Microopto electromechanical systems, Micromirrors, Actuators, Polymers, Astronomical instrumentation, Aerospace engineering, Molybdenum, Wavefronts, Spectroscopy

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Proceedings Article | 21 November 2017 Open Access

MOEMs devices for future astronomical instrumentation in space

Frédéric Zamkotsian, Arnaud Liotard, Patrick Lanzoni, Kacem ElHadi, Severin Waldis, Wilfried Noell, Nico de Rooij, Veronique Conedera, Norbert Fabre, Sylvaine Muratet, Henri Camon

Proceedings Volume 10567, 105672P (2017) https://doi.org/10.1117/12.2308036

KEYWORDS: Actuators, Mirrors, Micromirrors, Microopto electromechanical systems, Polymers, Space telescopes, Aerospace engineering, Molybdenum, Deformable mirrors, Electrodes

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Proceedings Article | 20 July 2010 Paper

Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico De Rooij

Proceedings Volume 7739, 77394Q (2010) https://doi.org/10.1117/12.858258

KEYWORDS: Micromirrors, Electrodes, Mirrors, Molybdenum, Cryogenics, Astronomical imaging, Spectroscopes, Space telescopes, Silicon, Infrared telescopes

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Proceedings Article | 17 February 2010 Paper

Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7594, 75940P (2010) https://doi.org/10.1117/12.841547

KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Molybdenum, Microfabrication, Cryogenics, Astronomical imaging, Space telescopes, Silicon

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Proceedings Article | 24 February 2009 Paper

Large micromirror array for multi-object spectroscopy in a cryogenic environment

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Pierre-Andre Clerc, Wilfried Noell, Nico de Rooij

Proceedings Volume 7208, 72080K (2009) https://doi.org/10.1117/12.811117

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Silicon, Astronomical imaging, Space telescopes, Telescopes, Molybdenum, Optical alignment

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Proceedings Article | 19 February 2009 Paper

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Stefan Weber, Severin Waldis, Wilfried Noell, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, Nico de Rooij

Proceedings Volume 7208, 720805 (2009) https://doi.org/10.1117/12.808162

KEYWORDS: Mirrors, Micromirrors, Femtosecond phenomena, Phase shift keying, Ultraviolet radiation, Femtosecond pulse shaping, Amplitude modulation, Pulse shaping, Deep reactive ion etching, Microelectromechanical systems

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Proceedings Article | 25 July 2008 Paper

Micromirror array for multiobject spectroscopy in ground-based and space telescopes

Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7018, 70182S (2008) https://doi.org/10.1117/12.790358

KEYWORDS: Micromirrors, Mirrors, Cryogenics, Space telescopes, Coating, Astronomical imaging, Silicon, Infrared spectroscopy, Telescopes, Spectroscopy

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SPIE Journal Paper | 1 April 2008

Uniform tilt-angle micromirror array for multiobject spectroscopy

Severin Waldis, Frederic Zamkotsian, Pierre-Andre Clerc, Wilfried Noell, Michael Zickar, Patrick Lanzoni, Nicolaas de Rooij

JM3, Vol. 7, Issue 02, 021014, (April 2008) https://doi.org/10.1117/12.10.1117/1.2920338

KEYWORDS: Mirrors, Micromirrors, Electrodes, Cryogenics, Astronomical imaging, Semiconducting wafers, Spectroscopy, Deep reactive ion etching, Coating, Spectrographs

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Proceedings Article | 14 February 2008 Paper

Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation

Frederic Zamkotsian, Emmanuel Grassi, Severin Waldis, Rudy Barette, Patrick Lanzoni, Christophe Fabron, Wilfried Noell, Nico de Rooij

Proceedings Volume 6884, 68840D (2008) https://doi.org/10.1117/12.768410

KEYWORDS: Mirrors, Micromirrors, Cryogenics, Interferometry, Molybdenum, Space telescopes, Silicon, Microopto electromechanical systems, Gold, Astronomical imaging

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Proceedings Article | 13 February 2008 Paper

Micromirrors for multiobject spectroscopy: optical and cryogenic characterization

Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 6887, 68870B (2008) https://doi.org/10.1117/12.764381

KEYWORDS: Micromirrors, Mirrors, Cryogenics, Coating, Silicon, Gold, Reflectivity, Thin films, Infrared radiation, Astronomical imaging

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Proceedings Article | 5 September 2007 Paper

Micromirror arrays for object selection

Severin Waldis, Frederic Zamkotsian, Pierre-Andre Clerc, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6715, 671504 (2007) https://doi.org/10.1117/12.754184

KEYWORDS: Mirrors, Micromirrors, Electrodes, Cryogenics, Silicon, Semiconducting wafers, Space telescopes, Spectrographs, Deep reactive ion etching, Telescopes

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Proceedings Article | 14 February 2007 Paper

Compact large-stroke piston tip-tilt actuator and mirror

W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, N. de Rooij

Proceedings Volume 6467, 64670Q (2007) https://doi.org/10.1117/12.698937

KEYWORDS: Mirrors, Photomasks, Actuators, Beam shaping, Electrodes, Oxides, Deep reactive ion etching, Micromirrors, Adaptive optics, Etching

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Proceedings Article | 22 January 2007 Paper

Uniform tilt-angle micromirror array for multi-object spectroscopy

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6466, 646603 (2007) https://doi.org/10.1117/12.702012

KEYWORDS: Mirrors, Electrodes, Micromirrors, Space telescopes, Astronomical imaging, Spectrographs, Astronomy, Silicon, Spectroscopy, Semiconducting wafers

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Proceedings Article | 6 July 2006 Paper

Micro-mirror array for multi-object spectroscopy

Frederic Zamkotsian, Severin Waldis, Wilfried Noell, Kacem ElHadi, Patrick Lanzoni, Nico de Rooij

Proceedings Volume 6273, 62731Q (2006) https://doi.org/10.1117/12.671911

KEYWORDS: Micromirrors, Mirrors, Astronomical imaging, Molybdenum, Electrodes, James Webb Space Telescope, Space telescopes, Spectrographs, Telescopes, Microopto electromechanical systems

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Proceedings Article | 23 January 2006 Paper

High-fill factor micro-mirror array for multi object spectroscopy

Severin Waldis, Pierre-Andre Clerc, Frederic Zamkotsian, Michael Zickar, Wilfried Noell, Nico de Rooij

Proceedings Volume 6114, 611408 (2006) https://doi.org/10.1117/12.647493

KEYWORDS: Mirrors, Electrodes, Micromirrors, Semiconducting wafers, Photomasks, Deep reactive ion etching, Astronomical imaging, Spectrographs, Silicon, Molybdenum

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Proceedings Article | 2 October 2003 Paper

Video-rate optical coherence tomography imaging with smart pixels

Stephan Beer, Severin Waldis, Peter Seitz

Proceedings Volume 5140, (2003) https://doi.org/10.1117/12.500606

KEYWORDS: Optical coherence tomography, Demodulation, Sensors, Image sensors, Signal detection, Modulation, Coherence imaging, Imaging systems, Linear filtering, Optical imaging

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Showing 5 of 16 publications

Conference Committee Involvement (1)

Zinc Oxide Materials and Devices IV

25 January 2009 | San Jose, California, United States

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