Mr. Shang Feng Weng Profile

Shang Feng Weng

at United Microelectronics Corp

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Publications (2)

Proceedings Article | 26 September 2019 Paper

Practical lithography hotspot identification using mask process model

Pai Chi Chen, Chain Ting Huang, Shang Feng Weng, Yung Feng Cheng, Young Ham, Colbert Lu, Michael Green, Mohamed Ramadan, Hong Jen Lee, Chris Progler

Proceedings Volume 11148, 111481H (2019) https://doi.org/10.1117/12.2537935

KEYWORDS: Lithography, Photomasks, Process modeling, Optical proximity correction, Semiconducting wafers, Machine learning, Resolution enhancement technologies, Source mask optimization, Critical dimension metrology, Computer simulations

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Proceedings Article | 27 June 2019 Paper

Mask process correction for optical weak pattern improvement

Pai Chi Chen, Chain Ting Huang, Shang Feng Weng, Yung Feng Cheng, Kazunori Nagai, Kenji Kono

Proceedings Volume 11178, 111780Q (2019) https://doi.org/10.1117/12.2535770

KEYWORDS: Photomasks, Optical proximity correction, Scanning electron microscopy, Optical calibration, Critical dimension metrology, Optical simulations, Bridges, Etching, Calibration, Wafer-level optics

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