Dr. Shankar C. Acharya Profile

Dr. Shankar C. Acharya

Sr. Applications Engineer at General Chemical Corp

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Publications (1)

Proceedings Article | 2 June 2003 Paper

Method for rapid screening of photoresist strippers for acceptance in DUV lithographic areas

John Moore, Shankar Acharya

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.488118

KEYWORDS: Deep ultraviolet, Photoresist materials, FT-IR spectroscopy, Chemistry, Photoresist processing, Lithography, Catalysis, Semiconducting wafers, Photoresist developing, Statistical analysis

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