Dr. Shaolin Zhou Profile

Dr. Shaolin Zhou

at South China University of Technology

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Author

Publications (6)

Proceedings Article | 13 December 2021 Paper

High-efficiency mid-infrared transmissive Huygens dielectric metasurface

Ruirui Song, Wenbin Li, Qinling Deng, Shaolin Zhou

Proceedings Volume 12072, 1207203 (2021) https://doi.org/10.1117/12.2604930

KEYWORDS: Dielectrics, Mid-IR, Diffraction, Bessel beams, Phase modulation, Infrared sensors, Diffraction gratings, Beam propagation method, Wavefronts, Wave propagation

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Proceedings Article | 13 December 2021 Paper

Nonvolatile silicon photonic 1×2 switch by integrating the phase change chalcogenide into microring network

Ziyang Ye, Ruirui Song, Shaolin Zhou

Proceedings Volume 12072, 120720K (2021) https://doi.org/10.1117/12.2603934

KEYWORDS: Switches, Refractive index, Transmittance, Crystals, Waveguides, Silicon, Silicon photonics, Photonic crystals, Integrated optics, Microrings

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Proceedings Article | 24 November 2021 Paper

Electrically reconfigurable terahertz digital metasurface based on vanadium dioxide phase transition

Qinling Deng, Ruirui Song, Yan Tang, Shaolin Zhou

Proceedings Volume 12066, 1206607 (2021) https://doi.org/10.1117/12.2601956

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Proceedings Article | 25 October 2016 Paper

UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication

Qian Deng, Junbo Liu, Shaolin Zhou, Yan Tang, Lixin Zhao, Song Hu, Yinghong Chen

Proceedings Volume 9685, 96850M (2016) https://doi.org/10.1117/12.2243456

KEYWORDS: Ultraviolet radiation, Lithography, Lithographic illumination, Photomasks, Ions, Diffraction, UV optics, Nanoimprint lithography, Second-harmonic generation, Semiconducting wafers

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SPIE Journal Paper | 1 August 2011

Fringe pattern analysis for optical alignment in nanolithography using two-dimentional Fourier transform

Feng Xu, Hu Song, Shaolin Zhou

OE, Vol. 50, Issue 08, 088001, (August 2011) https://doi.org/10.1117/12.10.1117/1.3609007

KEYWORDS: Fringe analysis, Fourier transforms, Optical alignment, Semiconducting wafers, Photomasks, Nanolithography, Linear filtering, Error analysis, Lithography, Numerical simulations

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Proceedings Article | 22 October 2010 Paper

Positioning scheme based on grating modulation and phase imaging in lithography

Shaolin Zhou, Feng Xu, Song Hu, Xiaoping Tang

Proceedings Volume 7657, 76571G (2010) https://doi.org/10.1117/12.866753

KEYWORDS: Semiconducting wafers, Optical alignment, Photomasks, Diffraction gratings, Lithography, Modulation, Diffraction, Nanoimprint lithography, Phase imaging, Phase shifts

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Showing 5 of 6 publications

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