Dr. Sharad Saxena Profile

Dr. Sharad Saxena

at PDF Solutions Inc

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Publications (3)

Proceedings Article | 10 July 2003 Paper

Characterization and modeling of intradie variation and its applications to design for manufacturability

Sharad Saxena, Carlo Guardiani, Michele Quarantelli, Nicola Dragone, Sean Minehane, Patrick McNamara, Jeff Babcock

Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.497477

KEYWORDS: Design for manufacturability, System on a chip, Field effect transistors, Transistors, Instrument modeling, Manufacturing, Process control, Statistical analysis, Statistical modeling, Device simulation

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Proceedings Article | 27 August 1997 Paper

Methods for the design of microelectronic devices and process flows for manufacturability

Sharad Saxena, Richard Burch, P. Mozumder, Karthik Vasanth, Suraj Rao, Joe Davis, Chenjing Fernando

Proceedings Volume 3212, (1997) https://doi.org/10.1117/12.284600

KEYWORDS: Manufacturing, Process control, Semiconducting wafers, Design for manufacturability, Process modeling, Transistors, Stochastic processes, Optimization (mathematics), Reliability, Microelectronics

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Proceedings Article | 16 September 1994 Paper

Advanced statistical process control of a chemical vapor tungsten deposition process on an Applied Materials Centura reactor

Jerry Stefani, Scott Poarch, Sharad Saxena, P. Mozumder

Proceedings Volume 2336, (1994) https://doi.org/10.1117/12.186797

KEYWORDS: Semiconducting wafers, Process modeling, Tungsten, Process control, Model-based design, Chemical vapor deposition, Wafer testing, Optimization (mathematics), Feedback control, Performance modeling

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