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Prof. Sheng Qiang
at Harbin Institute of Technology
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Author
Publications (1)
Proceedings Article | 23 September 2015 Paper
Research on model identification of ultra-precision motion stage
Sheng Qiang, Bin Wang
Proceedings Volume 9577, 957706 (2015) https://doi.org/10.1117/12.2185797
KEYWORDS: Motion models, Genetic algorithms, Mathematical modeling, Electroluminescence, Radium, Lithography, Genetics, Promethium, Motion analysis, Semiconducting wafers
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