Dr. Zhuang Sheng Profile

Dr. Zhuang Sheng

at Institute of Optics and Electronics CAS

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Publications (2)

Proceedings Article | 15 October 2012 Paper

Research of communication mechanism based USB in wafer stage of lithography

Zhuang Sheng, Xiaoping Tang, Jinglong Li

Proceedings Volume 8418, 841818 (2012) https://doi.org/10.1117/12.973654

KEYWORDS: Field programmable gate arrays, Lithography, Semiconducting wafers, Data transmission, Control systems, Telecommunications, Error analysis, Human-machine interfaces, Clocks, Integrated circuits

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Proceedings Article | 15 October 2012 Paper

Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography

Qi Liu, Ping Ma, Song Hu, Lanlan Li, Jiangping Zhu, Zhuang Sheng

Proceedings Volume 8418, 84180X (2012) https://doi.org/10.1117/12.971471

KEYWORDS: Lithography, Control systems, Actuators, Mathematical modeling, Optics manufacturing, Feedback control, Servomechanisms, Integrated circuits, Device simulation, Interferometers

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