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Shi-Qing Wang
Vice President/Sales & Business Development
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Publications (1)
Proceedings Article | 11 August 1999 Paper
ILD thermal stability in deep-submicron technologies: from thin to ultrathin dielectric films
David Hsu, Hyungkun Kim, Frank Shi, Bin Zhao, Maureen Brongo, P. Schilling, Shi-Qing Wang
Proceedings Volume 3883, (1999) https://doi.org/10.1117/12.360588
KEYWORDS: Polymer thin films, Polymers, Polymethylmethacrylate, Glasses, Thin films, Picosecond phenomena, Data modeling, Refractive index, Dielectrics, Silicon
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