Prof. Shigeki Mori Profile

Prof. Shigeki Mori

at Hitachi Ltd

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Author

Publications (3)

Proceedings Article | 22 March 2007 Paper

Material design of negative-tone polyphenol resist for EUV and EB lithography

Hideo Hada, Kyoko Kojima, Junichi Onodera, Daiju Shiono, Shigeki Mori

Proceedings Volume 6519, 65191D (2007) https://doi.org/10.1117/12.711759

KEYWORDS: Lithography, Extreme ultraviolet lithography, Line edge roughness, Extreme ultraviolet, Semiconductors, Molybdenum, Polymers, Inspection, Chromatography, Molecules

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Proceedings Article | 20 August 2004 Paper

Proximity-effect correction software for EPL using the pattern classify method

Kyoji Nakajo, Hiroshi Fukuda, Naomi Shimada, Masanori Shoji, Fumio Murai, Akio Sato, Hirokazu Sambayashi, Kenzo Goto, Shigeki Mori

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557820

KEYWORDS: Critical dimension metrology, Photomasks, Semiconducting wafers, Projection lithography, Software development, Silicon, Scattering, Monte Carlo methods, Optical proximity correction, Analytical research

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Proceedings Article | 28 August 2003 Paper

Proximity-effect correction for EPL by using multiple pattern-area-density maps and pattern classification

Akio Sato, Fumio Murai, Kyoji Nakajo, Shigeki Mori, Hiroshi Fukuda

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504235

KEYWORDS: Image classification, Backscatter, Data processing, Optical aberrations, Electron beams, Data corrections, Lithography, Monochromatic aberrations, Double patterning technology, Projection lithography

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