Dr. Shih-Chia Scott Chang
at Delphi Research Labs
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Sensors, Etching, Glasses, Crystals, Silicon, Diffusion, Boron, Gyroscopes, Reactive ion etching, Semiconducting wafers

Proceedings Article | 30 August 1999 Paper
Proc. SPIE. 3874, Micromachining and Microfabrication Process Technology V
KEYWORDS: Etching, Crystals, Silicon, Doping, Bridges, Boron, Plasma etching, Laser crystals, Semiconducting wafers, High aspect ratio silicon micromachining

Proceedings Article | 5 September 1997 Paper
Proc. SPIE. 3223, Micromachining and Microfabrication Process Technology III
KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Silicon, Integrated circuits, Micromachining, Plasma etching, Integrated circuit design, Wafer bonding, Integrated circuit packaging

Proceedings Article | 5 September 1997 Paper
Proc. SPIE. 3223, Micromachining and Microfabrication Process Technology III
KEYWORDS: Gold, Lithography, Ultraviolet radiation, Crystals, X-rays, Nickel, X-ray microscopy, Transmission electron microscopy, Photoresist materials, Plating

Proceedings Article | 19 September 1995 Paper
Proc. SPIE. 2639, Micromachining and Microfabrication Process Technology
KEYWORDS: Seaborgium, Sensors, Electrodes, Nickel, Silicon, Bridges, Plating, Selenium, Mechanical sensors, Temperature metrology

Proceedings Volume Editor (2)

SPIE Conference Volume | 5 September 1997

SPIE Conference Volume | 23 September 1996

Conference Committee Involvement (2)
Micromachining and Microfabrication Process Technology III
29 September 1997 | Austin, TX, United States
Micromachining and Microfabrication Process Technology II
14 October 1996 | Austin, TX, United States
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