Dr. Shih-Feng Tseng Profile

Dr. Shih-Feng Tseng

Research fellow at Taiwan Instrument Research Institute

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Publications (8)

Proceedings Article | 7 March 2019 Paper

Design, fabrication, identification and test of a closed-loop moving magnetic scanning module for RGB laser projector

Chien-Kai Chung, Chen-Chang Lin, Ming-Fu Chen, Shih-Feng Tseng

Proceedings Volume 11053, 110533B (2019) https://doi.org/10.1117/12.2512125

KEYWORDS: Laser systems engineering, Laser scanners, Sensors, RGB color model, Projection systems, Control systems, Magnetism, Chemical oxygen iodine lasers, Mathematical modeling, System identification

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SPIE Journal Paper | 27 May 2017

Absolute measurement method for correction of low-spatial frequency surface figures of aspherics

Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, Cheng-Kuo Sung

OE, Vol. 56, Issue 05, 055101, (May 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.5.055101

KEYWORDS: Aspheric lenses, Mirrors, Computer generated holography, Manufacturing, Aspheric optics, Optics manufacturing, Calibration, Monochromatic aberrations

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Proceedings Article | 24 March 2017 Paper

Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens

Wei-Cheng Lin, Shenq-Tsong Chang, Chien-Kai Chung, Yu-Chuan Lin, Shih-Feng Tseng

Proceedings Volume 10147, 101471V (2017) https://doi.org/10.1117/12.2258205

KEYWORDS: Mirrors, Reflectivity, Optomechanical design, Lithography, Adaptive optics, Distortion, Wavefront distortions, Optical mounts, Glasses, Ceramics, Optical fabrication, Monochromatic aberrations, Computer generated holography, Wavefronts

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Proceedings Article | 2 September 2015 Paper

Aligning and measuring the curvature and thickness of high-precision lens

Kun-Huan Wu, Shenq-Tsong Chang, Ming-Ying Hsu, Ting-Ming Huang, Wei-Yao Hsu, Shih-Feng Tseng

Proceedings Volume 9573, 95730U (2015) https://doi.org/10.1117/12.2185525

KEYWORDS: Spherical lenses, Optical design, Polishing, Surface finishing, Interferometers, Laser optics, Image quality, Tolerancing, Lens design, Optical testing

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Proceedings Article | 17 July 2015 Paper

A novel absolute measurement for the low-frequency figure correction of aspheric surfaces

Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, Cheng-Kuo Sung

Proceedings Volume 9524, 952417 (2015) https://doi.org/10.1117/12.2189408

KEYWORDS: Mirrors, Computer generated holography, Aspheric lenses, Wavefronts, Optical spheres, Surface finishing, Aspheric optics, Calibration, Monochromatic aberrations, Polishing

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SPIE Journal Paper | 22 July 2014

Dual-photoresist complementary lithography technique for the formation of submicron patterns on sapphire substrates

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, J. Andrew Yeh, Donyau Chiang

JM3, Vol. 13, Issue 03, 033004, (July 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.3.033004

KEYWORDS: Photoresist materials, Oxides, Sapphire, Lithography, Plasma, Etching, Crystals, Laser development, Oxygen, Chlorine

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Proceedings Article | 31 March 2014 Paper

Dual photoresist complimentary lithography technique produces sub-micro patterns on sapphire substrates

Chun-Ming Chang, Shih-Feng Tseng, Chao-Te Lee, Wen-Tse Hsiao, Jer-Liang Yeh, Donyau Chiang

Proceedings Volume 9052, 90521R (2014) https://doi.org/10.1117/12.2044900

KEYWORDS: Photoresist materials, Oxides, Sapphire, Etching, Plasma, Oxygen, Crystals, Lithography, Laser development, Chlorine

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Proceedings Article | 22 June 2013 Paper

Effects of macro- and micro-hole milling parameters on Al2O3 ceramics using an ultraviolet laser system

W. T. Hsiao, S. F. Tseng, C. K. Chung, K. C. Huang, M. F. Chen

Proceedings Volume 8769, 87693L (2013) https://doi.org/10.1117/12.2018981

KEYWORDS: Ceramics, Laser drilling, Laser systems engineering, Laser processing, Ultraviolet radiation, Silicon, Semiconductor lasers, Integrated circuits, Diamond machining, Semiconducting wafers

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Showing 5 of 8 publications

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