Mr. Shih-Lung Tsai Profile

Shih-Lung Tsai

Project Manager at Macronix International Co Ltd

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Publications (2)

Proceedings Article | 16 March 2009 Paper

Image-assistant OPC model calibration on 65nm node contact layer

Y. Y. Tsai, S. L. Tsai, Fred Lo, Elvis Yang, T. H. Yang, K. C. Chen, Chih-Yuan Lu

Proceedings Volume 7274, 727426 (2009) https://doi.org/10.1117/12.813461

KEYWORDS: Calibration, Data modeling, Scanning electron microscopy, Optical proximity correction, Image processing, Feature extraction, Error analysis, Wafer testing, Process modeling, Photomasks

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Proceedings Article | 7 March 2008 Paper

Variable loading kernels for OPC modeling

S. L. Tsai, Fred Lo, Elvis Yang, T. H. Yang, K. C. Chen, C. Y. Lu

Proceedings Volume 6924, 69243X (2008) https://doi.org/10.1117/12.768625

KEYWORDS: Optical proximity correction, Calibration, Process modeling, Optical lithography, Photomasks, Photoresist materials, Systems modeling, Lithography, Mathematical modeling, Image transmission

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