Dr. Shinichi Hasegawa Profile

Dr. Shinichi Hasegawa

Execuitve Director CTO at Tsukuba Semi Technology Inc

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Publications (2)

Proceedings Article | 17 October 2008 Paper

Phase shift improvement in ArF/KrF haze-free mask cleaning

Cathy Liu, Shirley Zhao, Eric Guo, Shinichi Hasegawa, Keiichi Nemoto, Tsuneaki Kuwajima

Proceedings Volume 7122, 712212 (2008) https://doi.org/10.1117/12.801439

KEYWORDS: Ultraviolet radiation, Phase shifts, Excimers, Photomasks, Scanning probe microscopy, Critical dimension metrology, Air contamination, Mask cleaning, Nitrogen, Scanning electron microscopy

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Proceedings Article | 20 May 2006 Paper

Sulfate-free photomask cleaning technology

Shingo Anzai, Noriaki Takagi, Tomoaki Kamiyama, Naotoshi Kawaguchi, Mikio Ishijima, Toshimitsu Watanabe, Hiroaki Morimoto, Tsuneaki Kuwajima, Makito Nakatsu, Shin-ichi Hasegawa

Proceedings Volume 6283, 62830B (2006) https://doi.org/10.1117/12.681737

KEYWORDS: Ozone, Photomasks, Air contamination, Photoresist processing, Mask cleaning, Transmittance, Signal attenuation, Contamination, Visualization, Halftones

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