Dr. Shinichi Imai Profile

Dr. Shinichi Imai

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Publications (7)

Proceedings Article | 14 March 2023 Presentation + Paper

Noncritically phase-matched self-difference frequency generation using transition-metal doped chalcogenides

Kentaro Miyata, Masaki Yumoto, Yasushi Kawata, Satoshi Wada, Shinichi Imai

Proceedings Volume 12405, 1240507 (2023) https://doi.org/10.1117/12.2653039

KEYWORDS: Chromium, Emission wavelengths, Chalcogenides, Difference frequency generation, Iron, Absorption, Mid-IR, Ions, Crystals

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SPIE Journal Paper | 8 March 2022

Burst pulse generation in Cr:ZnSe laser with mid-infrared tunability

Yusuke Okabayashi, Yasuhiro Tomihari, Masaki Yumoto, Shinichi Imai

OE, Vol. 61, Issue 03, 036105, (March 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.3.036105

KEYWORDS: Pulsed laser operation, Mid-IR, Laser applications, Optical filters, Laser processing, Optical engineering, Wavelength tuning, Tunable lasers, Q switched lasers, Mirrors

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Proceedings Article | 4 March 2022 Poster + Presentation + Paper

Pulse-on-demand Cr:ZnSe laser

Yusuke Okabayashi, Yasuhiro Tomihari, Masaki Yumoto, Shinichi Imai

Proceedings Volume 11980, 119800E (2022) https://doi.org/10.1117/12.2608418

KEYWORDS: Pulsed laser operation, Mid-IR, Wavelength tuning, Q switched lasers, Optical filters, Mirrors, Laser processing, Laser applications, Femtosecond phenomena, Absorption

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Proceedings Article | 5 March 2021 Presentation + Paper

2 µm Tm:YAG laser with pulse-on-demand operation

Yusuke Okabayashi, Yasuhiro Tomihari, Shinichi Imai, Masaki Yumoto, Satoshi Wada, Yasunori Furukawa

Proceedings Volume 11664, 1166407 (2021) https://doi.org/10.1117/12.2578014

KEYWORDS: Surgery, Pulsed laser operation, Laser processing, Laser applications, Mid-IR, Wind energy, Switches, Solid state lasers, Laser development, Chalcogenides

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Proceedings Article | 17 February 2010 Paper

Highly reliable 198-nm light source for semiconductor inspection based on dual fiber lasers

Shinichi Imai, Kazuto Matsuki, Nobutaka Kikuiri, Katsuhiko Takayama, Osamu Iwase, Yoshiharu Urata, Tatsuya Shinozaki, Yoshio Wada, Satoshi Wada

Proceedings Volume 7580, 75800H (2010) https://doi.org/10.1117/12.840467

KEYWORDS: Light sources, Inspection, Fiber lasers, Fiber amplifiers, Photomasks, Optical amplifiers, Semiconductors, Pulsed laser operation, Oscillators

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Proceedings Article | 19 May 2006 Paper

Development of advanced reticle inspection apparatus for hp 65 nm node device and beyond

Nobutaka Kikuiri, Shingo Murakami, Hideo Tsuchiya, Motonari Tateno, Kenichi Takahara, Shinichi Imai, Ryoichi Hirano, Ikunao Isomura, Yoshitake Tsuji, Yukio Tamura, Kenichi Matsumura, Kinya Usuda, Masao Otaki, Osamu Suga, Katsumi Ohira

Proceedings Volume 6283, 62830Y (2006) https://doi.org/10.1117/12.683579

KEYWORDS: Inspection, Photomasks, Image transmission, Laser optics, Optical inspection, Lithography, Defect detection, Sensors, Objectives, Image sensors

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Proceedings Article | 6 December 2004 Paper

Advanced mask inspection optical system (AMOS) using 198.5-nm wavelength for 65-nm (hp) node and beyond: system development and initial state D/D inspection performance

Toru Tojo, Ryoich Hirano, Hideo Tsuchiya, Junji Oaki, Takeshi Nishizaka, Yasushi Sanada, Kazuto Matsuki, Ikunao Isomura, Riki Ogawa, Noboru Kobayashi, Kazuhiro Nakashima, Shinji Sugihara, Hiromu Inoue, Shinichi Imai, Hitoshi Suzuki, Akihiko Sekine, Makoto Taya, Akemi Miwa, Nobuyuki Yoshioka, Katsumi Ohira, Dong-Hoon Chung, Masao Otaki

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.579133

KEYWORDS: Inspection, Photomasks, Sensors, Image sensors, Defect detection, Algorithm development, Speckle, Modulation transfer functions, Image processing, Optical inspection

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Showing 5 of 7 publications

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