Dr. Shinji Matsui Profile

Dr. Shinji Matsui

Manager at Univ of Hyogo

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Author

Publications (7)

Proceedings Article | 28 March 2014 Paper

Novel fluorinated compounds that improve durability of antistick layer for quartz mold

Tsuneo Yamashita, Hisashi Mitsuhashi, Masamichi Morita, Shuso Iyoshi, Makoto Okada, Shinji Matsui

Proceedings Volume 9049, 90491Q (2014) https://doi.org/10.1117/12.2044448

KEYWORDS: Quartz, Nanoimprint lithography, Semiconducting wafers, Fluorine, Ultraviolet radiation, Printing, Rutherfordium, Silicon, Acquisition tracking and pointing, Lithography

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Proceedings Article | 8 September 2011 Paper

Molecularly oriented surface relief formation and multi-directionally oriented crossed gratings in photoreactive liquid crystalline copolymer films

Nobuhiro Kawatsuki, Ayaka Tashima, Mizuho Kondo, Hiroshi Ono, Akira Emoto, Makoto Okada, Shinji Matsui

Proceedings Volume 8114, 81140A (2011) https://doi.org/10.1117/12.892129

KEYWORDS: Holography, Diffraction gratings, Polarization, Liquid crystals, Diffraction, Liquids, Crystals, Helium cadmium lasers, Annealing, Ions

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Proceedings Article | 23 October 2006 Paper

Critical factors for nanoscale injection molding

Sung-hwan Yoon, Junseok Lee, Keun Park, Joey Mead, Shinji Matsui, Carol Barry

Proceedings Volume 6380, 63800K (2006) https://doi.org/10.1117/12.686310

KEYWORDS: Silicon, Polymers, Atomic force microscopy, Semiconducting wafers, Scanning electron microscopy, Surface roughness, Solids, Manufacturing, Digital video discs, Electron beam lithography

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Proceedings Article | 19 October 2006 Paper

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Shinji Matsui

Proceedings Volume 6376, 637602 (2006) https://doi.org/10.1117/12.690807

KEYWORDS: Gallium, Nanolithography, Nanostructures, Scanning electron microscopy, Ions, Electrodes, Chemical vapor deposition, Image filtering, Carbon, 3D modeling

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Proceedings Article | 6 December 2005 Paper

Dynamic nano- and micro-devices based on protein motors

Reo Kometani, Yuji Shitaka, Hitoshi Suzuki, Shinji Matsui, Hitoshi Sakakibara, Kazuhiro Oiwa

Proceedings Volume 6050, 60500G (2005) https://doi.org/10.1117/12.654732

KEYWORDS: Proteins, Glasses, Polymers, Acquisition tracking and pointing, Polymethylmethacrylate, Molecules, In vitro testing, Microscopes, Luminescence, Lithography

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Proceedings Article | 16 May 2005 Paper

Evaluation of novel tooling for nanoscale injection molding

Sung-hwan Yoon, Chinnawat Srirojpinyo, Jun Lee, Joey Mead, Shinji Matsui, Carol Barry

Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.599959

KEYWORDS: Silicon, Semiconducting wafers, Gallium arsenide, Polymers, Titanium, Coating, Surface roughness, Metals, Scanning electron microscopy, Electron beam lithography

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Proceedings Article | 1 March 1991 Paper

Cleaved surfaces of high Tc films for making SNS structures

Ichiro Takeuchi, Jaw Tsai, Hisanao Tsuge, Noritsuga Matsukura, Sadahiko Miura, T. Yoshitake, Yoshikatsu Kojima, Shinji Matsui

Proceedings Volume 1394, (1991) https://doi.org/10.1117/12.25736

KEYWORDS: Interfaces, Resistance, Superconductors, Oxides, Metals, Technetium, Transistors, Lead, Electrodes, Gold

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Showing 5 of 7 publications

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