Prof. Shinya Fujinawa Profile

Prof. Shinya Fujinawa

at Ritsumeikan Univ

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Author

Publications (2)

Proceedings Article | 4 January 2006 Paper

Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography

S. Fujinawa, F. Kato, S. Sugiyama

Proceedings Volume 6037, 603717 (2006) https://doi.org/10.1117/12.638569

KEYWORDS: Polymethylmethacrylate, X-rays, Diffraction, Lithography, Synchrotron radiation, Fabrication, Diffraction gratings, Optical components, Submicron lithography, Tantalum

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Proceedings Article | 4 January 2006 Paper

Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography

Fumiki Kato, Shinya Fujinawa, Makoto Tsudo, Susumu Sugiyama

Proceedings Volume 6037, 60371R (2006) https://doi.org/10.1117/12.638600

KEYWORDS: Photomasks, X-rays, Near field diffraction, Diffraction, X-ray lithography, Lithography, Synchrotron radiation, X-ray diffraction, Scanning probe microscopy, Submicron lithography

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