CONFERENCE PROCEEDINGS
Advanced Search
Shinya Nagao
at Kagawa Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 6 December 2005 Paper
Fabrication and characteristic evaluation of a rotary type SDA with a rotation angle measuring scale
Shinya Nagao, Fumikazu Oohira, Takashi Matsui, Maho Hosogi, Gen Hashiguchi
Proceedings Volume 6050, 60500A (2005) https://doi.org/10.1117/12.648844
KEYWORDS: Optical fibers, Actuators, Computer programming, Mirrors, Microelectromechanical systems, Optical switching, Silicon, Etching, Reflectivity, Low pressure chemical vapor deposition
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top