Shiwei Song
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Thermal sensing, Microelectromechanical systems, Mid-IR, Optical sensors, Silicon, Photonic crystals, Process control, Sensing systems, Biological and chemical sensing, Industrial chemicals

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