Dr. Shiyong Yi
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (8)

Proceedings Article | 26 March 2013 Paper
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Semiconductors, Optical lithography, Annealing, Resistance, Scanning electron microscopy, Photoresist materials, Directed self assembly, Critical dimension metrology, Semiconducting wafers, Molecular self-assembly

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Optical lithography, Reflectivity, Control systems, Electroluminescence, Scanning electron microscopy, Photomasks, Line width roughness, Immersion lithography, Critical dimension metrology

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Optical lithography, Etching, Dry etching, Silicon, Chemistry, Photomasks, Line width roughness, Photoresist processing, Semiconducting wafers

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Polymers, Glasses, Diffusion, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Line edge roughness, Photoresist developing, Temperature metrology

Showing 5 of 8 publications
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