Dr. Shoumian Chen
at ICRD
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 29 September 2021
Yan Yan, Xuelong Shi, Tao Zhou, Bowen Xu, Chen Li, Wei Yuan, Ying Gao, Bingyang Pan, Xuling Diao, Shoumian Chen, Yuhang Zhao
JM3, Vol. 20, Issue 04, 041204, (September 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.041204
KEYWORDS: Scanning electron microscopy, Data modeling, Metrology, Optical proximity correction, Machine learning, 3D modeling, Performance modeling, Image processing, Statistical modeling, Convolution

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 113270A (2020) https://doi.org/10.1117/12.2551571
KEYWORDS: Machine learning, Lithography, Computational lithography, Neural networks, Photomasks, SRAF

Proceedings Article | 17 May 2019 Paper
Wei Yuan, Yifei Lu, Yuhang Zhao, Shoumian Chen, Ming Li, Hongmei Hu, Shuxin Yao, Zhunhua Liu, Qiaoqiao Li, Yu Tian, Zhiquan Zhou, Lirong Gu, Jinze Wang, Xichen Sheng, Guanyong Yan, Yazhong Zheng, Yueliang Yao, Yanjun Xiao, Liang Liu, Qian Zhao, Mu Feng, Jun Chen, Jun Lang
Proceedings Volume 10961, 109610N (2019) https://doi.org/10.1117/12.2516236
KEYWORDS: Metrology, Calibration, Data modeling, Scanning electron microscopy, Optical proximity correction, Performance modeling, Critical dimension metrology, Semiconducting wafers, Image processing, Photomasks

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10961, 109610O (2019) https://doi.org/10.1117/12.2515446
KEYWORDS: Computational lithography, Machine learning, Neural networks, Data modeling, Optical proximity correction, Lithography, Feature extraction, Convolution, Physics, Process modeling

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