Shu-Ting Hsu
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Mirrors, Scanners, Projection systems, Etching, Prototyping, Silica, Photomasks, Semiconducting wafers, Actuators, Laser scanners

Proceedings Article | 22 January 2007 Paper
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Reliability, Mirrors, Micromirrors, Silicon, Scanners, Microelectromechanical systems, Failure analysis, Actuators, Photomicroscopy, Crystals

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Mirrors, Micromirrors, Laser based displays, Laser scanners, Crystals, Silicon, Optical resolution, Microopto electromechanical systems, Electrodes, Optical simulations

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