Dr. Shuo Zhao
Senior Engineer at HMI
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Defect detection, Image processing, Electrons, Inspection, Optical inspection, Semiconductor manufacturing, System integration, Semiconducting wafers, Image quality standards, Defect inspection

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Lithography, Diffraction, Scanners, Error analysis, Wavefronts, Zernike polynomials, Photomasks, Extreme ultraviolet lithography, Aberration theory, Overlay metrology

Proceedings Article | 4 October 2016 Paper
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Multilayers, Finite-difference time-domain method, Coating, Printing, Photomasks, Extreme ultraviolet, Aluminum, Critical dimension metrology, Semiconducting wafers, Phase shifts

Proceedings Article | 5 October 2015 Presentation
Proc. SPIE. 9565, Liquid Crystals XIX
KEYWORDS: Diffraction, Refractive index, Sun, Distortion, Nonlinear optics, Liquid crystals, Holmium, Nonlinear response, Electrostriction, Diffraction gratings

Proceedings Article | 7 October 2014 Paper
Proc. SPIE. 9182, Liquid Crystals XVIII
KEYWORDS: Refractive index, Switching, Transient nonlinear optics, Birefringence, Image processing, Polarizers, Nonlinear optics, Liquid crystals, Optical switching, Pulsed laser operation

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