Dr. Shuxian Susan Hu
Senior CAE
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Defect inspection, Computer simulations, Optical lithography, Printing, Optical proximity correction, Resolution enhancement technologies, Manufacturing

Proceedings Article | 5 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Photomasks, Semiconducting wafers, Inspection, Manufacturing, Lithography, Binary data, Reticles, Computer simulations, Phase shifting, Etching

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