Shyi-Long Shy
Retired
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018

Proceedings Article | 21 March 2017 Paper
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Electron beam lithography, Electron beams, Etching, Metals, Dielectrics, Ions, Inspection, Photomasks

Proceedings Article | 1 April 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymethylmethacrylate, Polymers, Glasses, Coating, Printing, Picosecond phenomena, Nanoimprint lithography

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymers, Silicon, Coating, Resistance, Printing, Nanoimprint lithography, Photoresist processing

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Microelectromechanical systems, Lithography, Light sources, Light emitting diodes, Mercury, Lamps, Printing, Photoresist materials, Photomasks, Semiconducting wafers

Showing 5 of 20 publications
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