Dr. Soichi Owa
Nikon Fellow at Nikon Corp
SPIE Involvement:
Conference Chair | Editor | Author
Publications (32)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Deep ultraviolet, Solid state lasers, Laser scanners, 3D scanning, Spatial light modulators, Semiconducting wafers, Prototyping, Laser optics, Security printing, Printing

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical lithography, Lithography, Metamaterials, Optical metamaterials, Split ring resonators, Immersion lithography, High volume manufacturing, Maskless lithography, Semiconductor manufacturing, Scanners, Spatial light modulators, Photomasks, Semiconductors, Particles

Proceedings Article | 31 March 2014 Paper
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Optical lithography, Transistors, Immersion lithography, Metals, Reactive ion etching, Line edge roughness, Logic, Semiconductors, Etching, Photoresist processing

Proceedings Article | 10 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Semiconducting wafers, Photoresist processing, Immersion lithography, Double patterning technology, Atrial fibrillation, Polymers, Particles, Inspection, Printing, Scanning electron microscopy

Proceedings Article | 10 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Fiber optic illuminators, Source mask optimization, Resolution enhancement technologies, Modulation, Lithographic illumination, Photomasks, Optical lithography, Zernike polynomials, Immersion lithography, Double patterning technology

Showing 5 of 32 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 14 April 2021

SPIE Conference Volume | 13 April 2020

SPIE Conference Volume | 17 June 2019

SPIE Conference Volume | 23 May 2018

Conference Committee Involvement (14)
Optical / EUV Nanolithography and Practices
27 February 2022 | San Jose, California, United States
Optical Lithography XXXIV
22 February 2021 | Online Only, California, United States
Optical Microlithography XXXIII
25 February 2020 | San Jose, California, United States
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Showing 5 of 14 Conference Committees
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