Mr. Song-Shiang Lin Profile

Song-Shiang Lin

at Industrial Technology Research Institute

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 17 September 2002 Paper

New nanoporous low-dielectric-constant material for TFT passivation

Song-Shiang Lin, Rong-Jer Lee

Proceedings Volume 4918, (2002) https://doi.org/10.1117/12.483083

KEYWORDS: Polymers, Dielectrics, Ultraviolet radiation, Transmission electron microscopy, Optical filters, X-rays, Crystals, Transmittance, Sodium, Manufacturing

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Proceedings Article | 11 July 2000 Paper

Low-dielectric-constant photoresists for insulation on TFT array

Rong-Jer Lee, YouCheng Wu, ShihLieh Chen, Song-Shiang Lin, HsienWen Chien

Proceedings Volume 4078, (2000) https://doi.org/10.1117/12.392115

KEYWORDS: Photoresist materials, Dielectrics, Optical filters, Amorphous silicon, Electrodes, Transmittance, Ultraviolet radiation, LCDs, Optical lithography, Resistance

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Proceedings Article | 12 November 1999 Paper

Crystal growth and morphology investigation with 3D luminance of photonic organic DAST thin film

Tien-Jey Sheu, ChenYang Yui Whei, Song-Shiang Lin, Fu-Yuan Tsai, Yuan-Kuang Tu

Proceedings Volume 3896, (1999) https://doi.org/10.1117/12.370387

KEYWORDS: Thin films, Crystals, Waveguides, Photonic crystals, Crystallography, Optical fibers, 3D image processing, Nonlinear optics, Absorption, Image analysis

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Proceedings Article | 1 June 1991 Paper

DQN photoresist with tetrahydroxydiphenylmethane as ballasting group in PAC

Chao Huei Tzeng, Dhei-Jhai Lin, Song-Shiang Lin, Dong-Tsair Huang, Hwang-Kuen Lin

Proceedings Volume 1466, (1991) https://doi.org/10.1117/12.46395

KEYWORDS: Picture Archiving and Communication System, Photoresist materials, Lithography, Scanning electron microscopy, Absorption, Nickel, Semiconducting wafers, Integrated circuits, Very large scale integration, Integrated circuit design

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