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Dr. Song-haeng Lee
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Publications (1)
Proceedings Article | 22 February 2021 Presentation
Validation of machine learning OPC compact models for advanced manufacturing
Proceedings Volume 11614, 116140R (2021) https://doi.org/10.1117/12.2584940
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Manufacturing, Critical dimension metrology, Semiconductors, Photomasks, Semiconducting wafers, Optical lithography, Neural networks
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