Dr. Song Gao Profile

Dr. Song Gao

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Publications (3)

Proceedings Article | 19 August 2021 Presentation + Paper

The importance of in-die sampling using E-beam solution on yield improvement

Yu Zhang, Biqiu Liu, Cong Zhang, Yuyang Bian, Song Gao, Yifei Zhu, Xiaobo Guo, Jun Huang, Yaniv Abramovitz, Qiang Zhou, Uri Smolyan, Omri Baum, Shmuel Ben Nissim, Alexander Vipolzov

Proceedings Volume 11611, 116111X (2021) https://doi.org/10.1117/12.2585391

KEYWORDS: Overlay metrology, Instrument modeling, Semiconducting wafers, Measurement devices, Wafer-level optics, Mathematical modeling, Yield improvement, Etching, Optical testing, Data modeling

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Effects of lithography process conditions on unbiased line roughness by PSD analysis

Yuyang Bian, Lulu Lai, Song Gao, Dandan Hu, Xijun Guan, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang, Yongyu Yuan, Yujie Xu

Proceedings Volume 11611, 116112I (2021) https://doi.org/10.1117/12.2583545

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithography PR profile improvement and defects reduction by film pre-treatment

Jiantao Wang, Song Gao, Shuo Liu, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 1161134 (2021) https://doi.org/10.1117/12.2583833

KEYWORDS: Lithography, Reflectivity, Scanning electron microscopy, Silicon, Photoresist materials, Line width roughness, Semiconducting wafers, Etching, Coating

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