Dr. Song Peng Profile

Dr. Song Peng

Managing Director at Mightex Systems

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Author

Publications (8)

Proceedings Article | 30 December 1999 Paper

Through-focus image balancing of alternating phase-shifting masks

Song Peng

Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373328

KEYWORDS: Photomasks, Diffraction, Image transmission, Phase shifting, Etching, Image processing, Error analysis, Critical dimension metrology, Quartz, Wet etching

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Proceedings Article | 30 December 1999 Paper

High-resolution ultraviolet defect inspection of DAP (darkfield alternate phase) reticles

Lars Liebmann, Scott Mansfield, Alfred Wong, Jacek Smolinski, Song Peng, Kurt Kimmel, Maciej Rudzinski, James Wiley, Larry Zurbrick

Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373310

KEYWORDS: Reticles, Inspection, Photomasks, Quartz, Defect inspection, Manufacturing, Binary data, Etching, Semiconducting wafers, Scanning electron microscopy

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Proceedings Article | 14 June 1999 Paper

Direct interferometric phase measurement using an aerial image measurement system

Song Peng, Michael Hibbs

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350859

KEYWORDS: Phase measurement, Photomasks, Phase shifts, Interferometry, Phase shifting, Image analysis, Fringe analysis, Interferometers, Lithography, Etching

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Proceedings Article | 1 September 1998 Paper

High-density plasma dry etch for DUV attenuated phase-shifting masks

Song Peng, William Adair

Proceedings Volume 3412, (1998) https://doi.org/10.1117/12.328811

KEYWORDS: Etching, Photomasks, Phase shifts, Critical dimension metrology, Reactive ion etching, Molybdenum, Image processing, Quartz, Plasma etching, Plasma

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Proceedings Article | 7 May 1996 Paper

Experimental investigation of resonant grating filters based on two-dimensional gratings

Song Peng, G. Michael Morris

Proceedings Volume 2689, (1996) https://doi.org/10.1117/12.239641

KEYWORDS: Optical filters, Diffraction gratings, Reflection, Diffraction, Wave propagation, Photoresist materials, Waveguides, Interference filters, Waveguide modes, Antennas

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Proceedings Article | 22 September 1995 Paper

Efficient and stable implementation of rigorous coupled-wave analysis for surface-relief gratings

Song Peng, G. Michael Morris

Proceedings Volume 2532, (1995) https://doi.org/10.1117/12.221262

KEYWORDS: Diffraction gratings, Diffraction, System on a chip, Americium, Dielectrics, Differential equations, Dielectric polarization, Matrices, Scattering, Electromagnetism

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Proceedings Article | 12 May 1995 Paper

Application of diffractive optics to laser scan lenses

Dean Faklis, Song Peng, G. Michael Morris, Thomas Isberg

Proceedings Volume 2383, (1995) https://doi.org/10.1117/12.209036

KEYWORDS: Diffraction, Monochromatic aberrations, Laser optics, Distortion, Diffraction gratings, Photomasks, Optical design, Aspheric lenses, Lens design, Lenses

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Proceedings Article | 2 September 1992 Paper

Development of a compact phase-measuring ESPI system using single-mode fiber and diode laser

Song Peng, Charles Joenathan, Brij Khorana

Proceedings Volume 1779, (1992) https://doi.org/10.1117/12.140957

KEYWORDS: Semiconductor lasers, Optical isolators, Single mode fibers, Speckle pattern, Fringe analysis, Ferroelectric materials, Lenses, Interferometry, Laser optics, Fiber optics

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Showing 5 of 8 publications

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