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Sonyong Song
at Nikon Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 26 March 2019 Paper
Standalone alignment technology enabling feed-forward compensation of on-product overlay errors
Takehisa Yahiro, Junpei Sawamura, Sonyong Song, Sayuri Tanaka, Yuji Shiba, Satoshi Ando, Hiroyuki Nagayoshi, Jun Ishikawa, Masahiro Morita, Yuichi Shibazaki
Proceedings Volume 10959, 1095908 (2019) https://doi.org/10.1117/12.2514777
KEYWORDS: Optical alignment, Semiconducting wafers, Optical parametric oscillators, Scanners, Distortion, Sensors, Metrology, Wafer testing, Sensing systems, Overlay metrology
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