Shou-Peng Yeh
at National Taiwan Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 March 2015 Paper
Proc. SPIE. 9435, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015
KEYWORDS: Thin films, Ferroelectric materials, Sensors, Aerosols, Skin, Energy harvesting, Deposition processes, Thin film deposition, Gait analysis, Thin film devices

Proceedings Article | 16 April 2014 Paper
Proc. SPIE. 9057, Active and Passive Smart Structures and Integrated Systems 2014
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Polarization, Aerosols, Electrodes, Annealing, Silicon, Photography, Scanning electron microscopy, Deposition processes

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