Sreekanth Kandammathe Valiyaveedu
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7637, 76371G (2010) https://doi.org/10.1117/12.847981
KEYWORDS: Surface plasmons, Lithography, Metals, Prisms, Photoresist materials, Plasmonics, Silver, Aluminum, 3D image processing, Optical lithography

SPIE Journal Paper | 1 April 2010
JM3, Vol. 9, Issue 02, 023007, (April 2010) https://doi.org/10.1117/12.10.1117/1.3386680
KEYWORDS: Lithography, Surface plasmons, Optical lithography, Photoresist materials, Plasmonics, Diffraction gratings, Interfaces, Dielectrics, Nanolithography, Metals

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