We demonstrate laser-fabrication of length-controlled channels in the bulk of dielectrics with a spatial periodicity down to 0.7 µm and moderate aspect ratio (1:10), by single-shot ablation using different (fs/ps) pulse durations. We take advantage of beam shaping technique using an axicon and annular aperture to generate a Bessel beam with an extra control of the so-called “non-diffracting” length. The dimensions and pitch attained are suitable to envision the writing of NIR nanophotonic components. As a proof-of-principle demonstration, we fabricate patterns whose arrangements mimic photonic-crystal devices like waveguide, Y-coupler, and structures with square and triangular lattices as their basic units.
Periodic arrangements of micro- and nano-holes with controllable period, diameter and depth at the surface of materials are of high interest for a large range of applications. Here we present a laser-based approach using micro-Bessel beams with adjustable length to machine arrays of holes with subwavelength diameters and depths reaching several micrometers at the surface of fused silica. Suitability and limitations of the technique are investigated, including the challenge of avoiding crosstalk effects. The performance level shows the potential of the direct-laser-processing method towards the realization of integrated devices, as a flexible and cost-effective alternative technique to current multistep nanofabrication methods.
Arrays of nanoholes or nanochannels constitute the building block of integrated devices that open attractive applications like 2D photonic crystals, 2D metamaterials or nanostructured surfaces. Here we present a laser-based technique that enables to generate short-length micro-Bessel beams (irrespective of their core diameter) that we further use to machine depth-controlled holes with a cylindrical depth profile. We illustrate the potential of this method by fabricating square arrays of subwavelength-diameter holes with several-micrometers depth by direct laser ablation at the surface of fused silica.
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