Dr. Stefan Franz
at JENOPTIK Optical Systems GmbH
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 14 May 2007 Paper
Proc. SPIE. 6542, Infrared Technology and Applications XXXIII
KEYWORDS: Infrared imaging, Optical components, Polishing, Lenses, Laser development, Wavefronts, Modulation transfer functions, Infrared telescopes, Infrared lenses, Optics manufacturing

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Monochromatic aberrations, Telescopes, Deep ultraviolet, Sensors, Wavefront sensors, Wavefronts, Image quality, Objectives, Modulation transfer functions, Spherical lenses

Proceedings Article | 30 May 2003 Paper
Proc. SPIE. 5144, Optical Measurement Systems for Industrial Inspection III
KEYWORDS: Mirrors, Beam splitters, Optical sensors, Lenses, Interferometers, Sensors, Interferometry, Head, Distance measurement, Measurement devices

Proceedings Article | 21 September 1999 Paper
Proc. SPIE. 3824, Optical Measurement Systems for Industrial Inspection
KEYWORDS: Confocal microscopy, Microscopes, Optical sensors, Spatial frequencies, Sensors, Metals, Interferometry, Optical testing, 3D metrology, Zoom lenses

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