Dr. Stefan Gliech Profile

Dr. Stefan Gliech

at Fraunhofer-IOF

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 25 September 2008 Paper

Paper

Metal mirrors with excellent figure and roughness

R. Steinkopf, A. Gebhardt, S. Scheiding, M. Rohde, O. Stenzel, S. Gliech, V. Giggel, H. Löscher, G. Ullrich, P. Rucks, A. Duparre, S. Risse, R. Eberhardt, A. Tünnermann

Proceedings Volume 7102, 71020C (2008) https://doi.org/10.1117/12.797702

KEYWORDS: Mirrors, Metals, Single point diamond turning, Polishing, Surface finishing, Diamond turning, Aluminum, Manufacturing, Diamond, Optics manufacturing

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Proceedings Article | 23 February 2006 Paper

Paper

Scattering analysis of optical components in the DUV

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 6101, 61011H (2006) https://doi.org/10.1117/12.647416

KEYWORDS: Scattering, Light scattering, Scatter measurement, Multilayers, Deep ultraviolet, Atomic force microscopy, Optical components, Mirrors, Extreme ultraviolet, Optical spheres

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Proceedings Article | 20 October 2005 Paper

Paper

Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 5965, 59651B (2005) https://doi.org/10.1117/12.625780

KEYWORDS: Light scattering, Scattering, Scatter measurement, Multilayers, Vacuum ultraviolet, Mirrors, Autoregressive models, Deep ultraviolet, Optical spheres, Backscatter

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Proceedings Article | 1 September 2005 Paper

Paper

Surface texture investigation of ultra-precision optical components

Sven Schroeder, Juliane Ratteit, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 587813 (2005) https://doi.org/10.1117/12.616500

KEYWORDS: Scattering, Light scattering, Mirrors, Multilayers, Optics manufacturing, Autoregressive models, Scatter measurement, Sensors, Interfaces, Atomic force microscopy

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Proceedings Article | 31 August 2005 Paper

Paper

Scatter analysis of optical components from 193 nm to 13.5 nm

Sven Schroeder, Mathias Kamprath, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 58780T (2005) https://doi.org/10.1117/12.616423

KEYWORDS: Scattering, Light scattering, Extreme ultraviolet, Scatter measurement, Optical components, Mirrors, Multilayers, Laser scattering, Autoregressive models, Deep ultraviolet

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Proceedings Article | 31 August 2005 Paper

Paper

Investigating the ArF laser stability of CaF2 at elevated fluences

A. Burkert, Ch. Muehlig, W. Triebel, D. Keutel, U. Natura, L. Parthier, S. Gliech, S. Schroeder, A. Duparre

Proceedings Volume 5878, 58780E (2005) https://doi.org/10.1117/12.616904

KEYWORDS: Absorption, Scattering, Laser induced fluorescence, Laser scattering, Laser irradiation, Laser stabilization, Excimers, Light scattering, Luminescence, Excimer lasers

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Proceedings Article | 25 February 2004 Paper

Paper

157- and 193-nm scatter, R, and T measurement technique

Stefan Gliech, Henning Gessner, Annette Hultaker, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.513321

KEYWORDS: Scatter measurement, Reflectivity, Vacuum ultraviolet, Transmittance, Scattering, Optical spheres, Backscatter, Autoregressive models, Light scattering, Deep ultraviolet

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Proceedings Article | 25 February 2004 Paper

Paper

Characterization of CaF₂ substrates for VUV fluoride coatings

Annette Hultaker, Stefan Gliech, Henning Gessner, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512691

KEYWORDS: Scattering, Vacuum ultraviolet, Atomic force microscopy, Optical coatings, Scatter measurement, Light scattering, Surface finishing, Polishing, Autoregressive models, Silicon

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Proceedings Article | 4 November 2003 Paper

Paper

VUV light-scattering measurements of substrates and thin film coatings

Annette Hultaker, Stefan Gliech, Nils Benkert, Angela Duparre

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505585

KEYWORDS: Scatter measurement, Scattering, Light scattering, Reflectivity, Transmittance, Vacuum ultraviolet, Atomic force microscopy, Thin film coatings, Backscatter, Optical coatings

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Proceedings Article | 30 May 2003 Paper

Paper

System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm

Stefan Gliech, Henning Gessner, Angela Duparre

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472395

KEYWORDS: Light scattering, Reflectivity, Transmittance, Optical testing, Optical components, Laser optics, Sensors, Laser induced damage, Optical spheres, Digital Light Processing

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Proceedings Article | 30 May 2003 Paper

Paper

Results of a round-robin experiment on reflectivity measurments at a wavelength of 1.06 micron

Detlef Nickel, Christoph Fleig, Andrea Erhard, Andreas Letsch, Adolf Giesen, Marco Jupe, Kai Starke, Detlev Ristau, Oswald Wilhelm, Rudolf Huber, Rainer Haspel, Uwe Schuhmann, Chris Scharfenorth, Hans Joachim Eichler, Stefan Gliech, Angela Duparre, Michael Schulz-Grosser, Anna Krasilnikova, Alexandra Haise, Wolfgang Riede, Ona Balachninaite, Rimantas Grigonis, Valdas Sirutkaitis, Vladimir Kazakevich

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472005

KEYWORDS: Reflectivity, Laser optics, Laser induced damage, Digital video discs, Laser therapeutics, Transmittance, Laser components, Spectrophotometry, Dielectric mirrors

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Proceedings Article | 30 May 2003 Paper

Paper

Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter

Annette Hultaker, Nils Benkert, Stefan Gliech, Angela Duparre

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472392

KEYWORDS: Vacuum ultraviolet, Optical components, Laser optics, Dysprosium, Scattering, Laser induced damage, Ruthenium, Scatter measurement, Surface roughness, Reflectivity

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Proceedings Article | 2 November 2000 Paper

Paper

DUV/VUV light scattering measurement of optical components for lithography applications

Stefan Gliech, Joerg Steinert, Marcel Flemming, Angela Duparre

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405807

KEYWORDS: Scattering, Light scattering, Scatter measurement, Lamps, Optical spheres, Sensors, Optical testing, Optical components, Nitrogen, Lithography

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Proceedings Article | 2 November 2000 Paper

Paper

Advanced methods for surface and subsurface defect characterization of optical components

Joerg Steinert, Stefan Gliech, Andreas Wuttig, Angela Duparre, Horst Truckenbrodt

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405829

KEYWORDS: Light scattering, Surface finishing, Polishing, Scattering, Spatial frequencies, Atomic force microscopy, Silica, Scatter measurement, Surface roughness, Optical components

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Proceedings Article | 7 September 1999 Paper

Paper

Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors

Hartmut Kupfer, Frank Richter, Peter Schlott, Angela Duparre, Stefan Gliech

Proceedings Volume 3738, (1999) https://doi.org/10.1117/12.360106

KEYWORDS: Light scattering, Multilayers, Atomic force microscopy, Oxides, Sputter deposition, Mirrors, Scattering, Laser scattering, Silicon, Scatter measurement

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Proceedings Article | 6 September 1999 Paper

Paper

Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering

Stefan Gliech, Angela Duparre, Rolf-Juergen Recknagel, Gunther Notni

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360166

KEYWORDS: Atomic force microscopy, Surface finishing, Spatial frequencies, Light scattering, Polishing, Glasses, Optical interferometry, Scattering, Surface roughness, Data modeling

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Proceedings Article | 6 September 1999 Paper

Paper

International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696

Puja Kadkhoda, Claude Amra, Jean Bennett, Carole Deumie, Angela Duparre, Stefan Gliech, Christian Jolie, Helmut Kessler, Hans Lauth, Tomas Lindstroem, A. Mueller, Norbert Reng, Carl-Gustaf Ribbing, Detlev Ristau, Rainer Schuhmann, Uwe Schuhmann, Markus Tilsch

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360187

KEYWORDS: Scattering, Laser scattering, Scatter measurement, Optical spheres, Standards development, Optical components, Laser systems engineering, Laser applications, Inspection, Laser development

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Proceedings Article | 26 September 1997 Paper

Paper

Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement

Angela Duparre, Stefan Gliech

Proceedings Volume 3141, (1997) https://doi.org/10.1117/12.287805

KEYWORDS: Scattering, Scatter measurement, Surface finishing, Polishing, Laser scattering, Ultraviolet radiation, Atomic force microscopy, Light scattering, Optical testing, Backscatter

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Proceedings Article | 22 September 1997 Paper

Paper

Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

Angela Duparre, Stefan Gliech

Proceedings Volume 3110, (1997) https://doi.org/10.1117/12.281370

KEYWORDS: Scattering, Light scattering, Scatter measurement, Optical testing, Surface finishing, Optical spheres, Surface roughness, Laser scattering, Ultraviolet radiation, Glasses

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Proceedings Article | 19 August 1996 Paper

Paper

Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods

Stephan Pichlmaier, Karl Hehl, Uwe Schuhmann, Stefan Gliech, Angela Duparre

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246757

KEYWORDS: Scattering, Light scattering, Interfaces, Polarization, Atomic force microscope, Correlation function, Laser scattering, Atomic force microscopy, Coating, Multilayers

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Proceedings Article | 19 August 1996 Paper

Paper

Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

Stefan Gliech, Angela Duparre

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246758

KEYWORDS: Light scattering, Scattering, Optical spheres, Sensors, Optical components, Spatial frequencies, Scatter measurement, Light sources, Photomultipliers, Integrating spheres

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Proceedings Article | 4 November 1994 Paper

Paper

Interface and volume inhomegeneities in optical thin films investigated by light scattering methods

Angela Duparre, Stefan Gliech, Karl Hehl, Stephan Pichlmaier, Uwe Schuhmann

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192050

KEYWORDS: Light scattering, Scattering, Interfaces, Polishing, Scatter measurement, Atomic force microscopy, Thin films, Magnesium fluoride, Glasses, Spatial frequencies

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Showing 5 of 22 publications

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