Dr. Stefan Kubicek Profile

Dr. Stefan Kubicek

at imec

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Publications (2)

Proceedings Article | 30 April 2023 Presentation

Foundry compatible 300 mm process flows for Si spin and superconducting qubits

Danny Wan, Stefan Kubicek, Tsvetan Ivanov, Shana Massar, Massimo Mongillo, Anton Potocnik, Ruoyu Li, Clement Godfrin, Daniel Perez Lozano, Xiaoyu Piao, Julien Jussot, Yann Canvel, Antoine Pacco, Andriy Hikavyy, Henri Jansen, Asser Elsayed, Mohamed Shehata, Jeroen Verjauw, Rohith Acharya, Jacques Van Damme, George Simion, Kristiaan De Greve

Proceedings Volume PC12499, PC1249908 (2023) https://doi.org/10.1117/12.2662652

KEYWORDS: Quantum communications, Superconductors, Silicon, Quantum computing, Transistors, Optical lithography, Interfaces, Etching, Electron transport

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Proceedings Article | 27 March 2017 Presentation + Paper

CMOS patterning over high-aspect ratio topographies for N10/N7 using spin-on carbon hardmasks

Toby Hopf, Monique Ercken, Geert Mannaert, Eddy Kunnen, Zheng Tao, Nadia Vandenbroeck, Farid Sebaai, Yoshiaki Kikuchi, Hans Mertens, Stefan Kubicek, Steven Demuynck, Naoto Horiguchi

Proceedings Volume 10146, 1014618 (2017) https://doi.org/10.1117/12.2257668

KEYWORDS: Optical lithography, System on a chip, Carbon, Photoresist materials, Etching, Lithography, Front end of line, Silicon, Photomasks

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