Dr. Stefan Majoni Profile

Dr. Stefan Majoni

at Philips GmbH

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Author

Publications (3)

Proceedings Article | 28 May 2004 Paper

A 90-nm design-rule patterning application using alt-PSM with KrF lithography for volume manufacturing at k1=0.27

Stefan Majoni, Frank Driessen, Bryan Kasprowicz, Paul Harris

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.544254

KEYWORDS: Photomasks, Lithography, Manufacturing, Nanoimprint lithography, Optical lithography, Phase shifts, Photoresist processing, Semiconducting wafers, Monochromatic aberrations, Semiconductors

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Proceedings Article | 2 June 2003 Paper

Enhancing yield and productivity with process control applications for contact and via module

Stefan Majoni, Ilan Englard

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485025

KEYWORDS: Process control, Lithography, Metrology, Finite element methods, Inspection, Optical lithography, Safety, Single photon emission computed tomography

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Proceedings Article | 26 April 2001 Paper

Automatic resist parameter calibration procedure for lithography simulation

Bernd Tollkuehn, Max Hoepfl, Andreas Erdmann, Stefan Majoni, Marion Jess

Proceedings Volume 4404, (2001) https://doi.org/10.1117/12.425221

KEYWORDS: Data modeling, Diffusion, Lithography, Scanning electron microscopy, Calibration, Optimization (mathematics), Performance modeling, Critical dimension metrology, Computer simulations, Picture Archiving and Communication System

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