Prof. Stefan Sinzinger Profile

Prof. Stefan Sinzinger

Professor Optical Engg at Technische Univ Ilmenau

SPIE Involvement:

Editorial Board Member: Journal of Optical Microsystems | Author

Publications (56)

SPIE Journal Paper | 19 March 2023 Open Access

Diffractive Alvarez-Lohmann lenses for correcting aberrations of tunable membrane lenses

Leonhard Lenk, Stefan Sinzinger

OE, Vol. 62, Issue 03, 035103, (March 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.3.035103

KEYWORDS: Design and modelling, Lenses, Modulation transfer functions, Aberration correction, Zemax, Simulations, Optical engineering, Binary data, Optical surfaces, Monochromatic aberrations

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SPIE Journal Paper | 16 June 2022 Open Access

Design method for zoom systems based on tunable lenses

Leonhard Lenk, Beate Mitschunas, Stefan Sinzinger

OE, Vol. 61, Issue 06, 065103, (June 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.6.065103

KEYWORDS: Zoom lenses, Lenses, Optical engineering, Lens design, Modulation transfer functions, Sensors, Ray tracing, Monochromatic aberrations, Liquids, Imaging systems

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SPIE Journal Paper | 22 December 2021 Open Access

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Christoph Weigel, Ulrike Brokmann, Meike Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger

JOM, Vol. 1, Issue 04, 040901, (December 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.040901

KEYWORDS: Etching, Glasses, Reactive ion etching, Optical microsystems, Plasma, Ions, Silicate glass, Silicon, Crystals, Fluorine

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Proceedings Article | 9 March 2020 Presentation

Compressive sensing hyperspectral imaging with optimized diffractive optical elements (Conference Presentation)

Matthias Hübner, Leonhard Lenk, Eric Markweg, Stefan Sinzinger

Proceedings Volume 11287, 112870M (2020) https://doi.org/10.1117/12.2548037

KEYWORDS: Diffractive optical elements, Hyperspectral imaging, Compressed sensing, 3D acquisition, Optical filters, Diffraction, Remote sensing, Agriculture, Geology, Defense and security

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Proceedings Article | 21 June 2019 Paper

Micro- and nanofabrication technologies using the nanopositioning and nanomeasuring machines

Laura Weidenfeller, Martin Hofmann, Johannes Kirchner, Shraddha Supreeti, Ivo Rangelow, Stefan Sinzinger, Eberhard Manske

Proceedings Volume 11056, 1105637 (2019) https://doi.org/10.1117/12.2528136

KEYWORDS: Lithography, Sensors, Silicon, Nanofabrication, Laser processing, Photoresist materials, Interferometers, Scanning probe lithography, Optical lithography, Absorption

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To keep up with Moore’s law in future, the critical dimensions of device features must further decrease in size. Thus, the nano-electronics and nano-optics manufacturing is based on the ongoing development of the lithography and encompasses also some unconventional methods. In this context, we use the Nanopositioning and Nanomeasuring Machine (NPMM) to generate features in resist layers by means of Direct Laser Writing (DLW),¹ Field Emission Scanning Probe Lithography (FE-SPL)² and Soft UV-Nanoimprint Lithography (Soft UV-NIL)³ with highest accuracy. The NPMM was collaboratively developed by TU Ilmenau and SIOS Meßtechnik GmbH.⁴ The tool provides a large positioning volume of 25 mm × 25 mm × 5 mm with a positioning resolution of 0.1 nm and a repeatability of less than 0.3 nm over the full range. Previously a single electron transistor (SET) working at room temperature generated by FE-SPL has been demonstrated.⁵ However, the throughput is limited because of the serial writing scheme making Tennant’s law (At ∼ R5 ) valid.⁶ Here, At is the areal throughput and R the lithographic resolution. Thus, patterning of the whole NPMM positioning area by FE-SPL is very time consuming. In order to address this problem, different strategies and/or combinations are conceivable. In this work a so-called Mix-and-Match lithography is conducted. A fast generation of structures in the sub-micron range is possible by means of DLW. By this, features such as electrical wires, contact patches for bonding or labels are generated in resist. Subsequently, we use FE-SPL in order to define the actual nano-scaled features for quantum or single electron devices. In combination, DLW and FE-SPL are maskless lithography strategies, hence, offering completely novel opportunities for rapid nanoscale prototyping of largescale resist patterns. An explanation of this technique is given in a previous publication.⁷ Furthermore, after reactive ion etching, the sample can be used as template for Soft UV-NIL, thus resulting in a high-throughput process chain for future quantum and/or single electron devices.

Proceedings Article | 21 June 2019 Paper

Intrinsic surface feature based subaperture stitching of freeform wavefront

Kamal Pant, Dali Burada, Vinod Mishra, L. Pant, Amitava Ghosh, Gufran Khan, Stefan Sinzinger, Chandra Shakher

Proceedings Volume 11057, 1105708 (2019) https://doi.org/10.1117/12.2526037

KEYWORDS: Wavefronts, Image registration, Photovoltaics, Metrology, Data integration, Manufacturing, Phase measurement, Error analysis, Sensors, Freeform optics

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Proceedings Article | 26 March 2019 Paper

Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate

Shraddha Supreeti, Johannes Kirchner, Martin Hofmann, Rostyslav Mastylo, Ivo Rangelow, Eberhard Manske, Martin Hoffmann, Stefan Sinzinger

Proceedings Volume 10958, 1095819 (2019) https://doi.org/10.1117/12.2514832

KEYWORDS: Sensors, Ultraviolet radiation, Nanoimprint lithography, Silicon, Nanostructures, Lithography, Photoresist processing, Scanning electron microscopy, Fabrication, Optical sensors

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Proceedings Article | 4 March 2019 Paper

A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM

Johannes Kirchner, Laura Weidenfeller, Uwe Gerhardt, Rostyslav Mastylo, Michael Kühnel, Stefan Sinzinger, Eberhard Manske

Proceedings Volume 10930, 1093017 (2019) https://doi.org/10.1117/12.2508263

KEYWORDS: Sensors, Confocal microscopy, Laser scanners, Laser processing, Fiber coupled lasers

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Proceedings Article | 14 September 2018 Presentation + Paper

High power laser beam shaping for welding applications by means of diffractive elements

Yannick Bourgin, Falk Nagel, Patrick Feßer, Jean-Pierre Bergmann, Stefan Sinzinger

Proceedings Volume 10744, 107440X (2018) https://doi.org/10.1117/12.2320579

KEYWORDS: Diffractive optical elements, Computer generated holography, High power lasers, Metals, Gas lasers, Lithography, Laser welding, Diffusers, Semiconductor lasers, Etching

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SPIE Journal Paper | 22 August 2017

Experimental investigations on characterization of freeform wavefront using Shack–Hartmann sensor

Dali Burada, Kamal Pant, Mohamed Bichra, Gufran Khan, Stefan Sinzinger, Chandra Shakher

OE, Vol. 56, Issue 08, 084107, (August 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.8.084107

KEYWORDS: Wavefronts, Photovoltaics, Sensors, Aspheric lenses, Diffractive optical elements, Freeform optics, Interferometry, Optical engineering, Metrology, Error analysis

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Proceedings Article | 26 June 2017 Paper

Development of metrology for freeform optics in reflection mode

Dali Burada, Kamal Pant, Vinod Mishra, Mohamed Bichra, Gufran Khan, Stefan Sinzinger, Chandra Shakher

Proceedings Volume 10329, 103291K (2017) https://doi.org/10.1117/12.2270284

KEYWORDS: Metrology, Optics manufacturing, Wavefront sensors, Freeform optics, Sensors, Optical testing, Fabrication, Manufacturing, 3D metrology, Projection systems, Wavefronts, Beam splitters, Reflection, Photovoltaics

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Proceedings Article | 30 June 2016 Paper

Prediction of grinding tool wear and lifetime by using a test bench

C. Vogt, S. Sinzinger, M. Rohrbacher, R. Rascher

Proceedings Volume 10009, 100090Z (2016) https://doi.org/10.1117/12.2236212

KEYWORDS: Optics manufacturing, Surface finishing, Polishing, Virtual colonoscopy, Quartz, Motion detection, Sensors, Process control, Glasses, Ceramics

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Proceedings Article | 3 March 2016 Paper

Integrated microsystems for optical sensing and imaging applications

Roman Kleindienst, Stefan Sinzinger

Proceedings Volume 9751, 975110 (2016) https://doi.org/10.1117/12.2218237

KEYWORDS: Imaging systems, Microsystems, Free space optics, Integrated optics, Optical components, Optical sensing, Optical imaging, Freeform optics, Optical microsystems, Optical design, Beam shaping, Gas sensors, Diffraction, Sensors, Reflectivity

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Proceedings Article | 2 September 2015 Paper

Dependency between removal characteristics and defined measurement categories of pellets

C. Vogt, M. Rohrbacher, R. Rascher, S. Sinzinger

Proceedings Volume 9573, 95730N (2015) https://doi.org/10.1117/12.2189987

KEYWORDS: Quartz, Surface finishing, Polishing, Virtual colonoscopy, Photovoltaics, Error analysis, Lens grinding equipment, Motion detection, Spindles, Optics manufacturing

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Proceedings Article | 21 May 2015 Paper

2D stepping microdrive for hyperspectral imaging

Csaba Endrödy, Hannes Mehner, Adrian Grewe, Stefan Sinzinger, Martin Hoffmann

Proceedings Volume 9517, 95170K (2015) https://doi.org/10.1117/12.2178867

KEYWORDS: Actuators, Electrodes, Hyperspectral imaging, Deep reactive ion etching, Microsystems, Confocal microscopy, Microelectromechanical systems, Charge-coupled devices, Imaging systems, Aluminum

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Proceedings Article | 17 December 2014 Paper

Analysis of the influence of manufacturing and alignment related errors on an optical tweezer system

R. Kampmann, S. Sinzinger

Proceedings Volume 9293, 92930D (2014) https://doi.org/10.1117/12.2072873

KEYWORDS: Axicons, Optics manufacturing, Particles, Geometrical optics, Optical tweezers, Optical components, Error analysis, Mirrors, Optical design, Tolerancing

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Proceedings Article | 5 June 2014 Paper

Fluctuations in the intensity read out of CCD/CMOS arrays in digital holographic setups: an experimental investigation

Yang Wu, Damien Kelly, Adrian Stern, Stefan Sinzinger

Proceedings Volume 9117, 911708 (2014) https://doi.org/10.1117/12.2051206

KEYWORDS: Cameras, Speckle, Digital holography, Holography, Holograms, Charge-coupled devices, CCD cameras, Optical benches, Sensors, Light sources

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SPIE Journal Paper | 2 December 2013

Parabasal theory for plane-symmetric systems including freeform surfaces

Rania Abd El-Maksoud, Matthias Hillenbrand, Stefan Sinzinger

OE, Vol. 53, Issue 03, 031303, (December 2013) https://doi.org/10.1117/12.10.1117/1.OE.53.3.031303

KEYWORDS: Imaging systems, Fourier transforms, Systems modeling, Sensors, Optical engineering, Mirrors, Ray tracing, Optical imaging, Monochromatic aberrations, Reflectivity

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Proceedings Article | 30 September 2013 Paper

A theoretical comparison of Fresnel based digital holography and phase retrieval from the transport of intensity equation

Damien Kelly, Lysann Megel, Thomas Meinecke, Stefan Sinzinger

Proceedings Volume 8833, 88330G (2013) https://doi.org/10.1117/12.2024855

KEYWORDS: Charge-coupled devices, Spatial frequencies, Digital holography, Phase retrieval, Phase measurement, Imaging systems, Fourier transforms, Electroluminescent displays, Holography, Wave plates

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SPIE Journal Paper | 10 June 2013

MOEMS tunable microlens made of aluminum nitride membranes

Steffen Leopold, Tobias Polster, Daniel Paetz, Fabian Knoebber, Oliver Ambacher, Stefan Sinzinger, Martin Hoffmann

JM3, Vol. 12, Issue 02, 023012, (June 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023012

KEYWORDS: Aluminum nitride, Microopto electromechanical systems, Microlens, Lenses, Spherical lenses, Nitrogen, Semiconducting wafers, Manufacturing, Silicon, Solids

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Proceedings Article | 13 May 2013 Paper

Parallelized chromatic confocal sensor systems

Matthias Hillenbrand, Adrian Grewe, Mohamed Bichra, Roman Kleindienst, Lucia Lorenz, Raoul Kirner, Robert Weiß, Stefan Sinzinger

Proceedings Volume 8788, 87880V (2013) https://doi.org/10.1117/12.2020334

KEYWORDS: Sensors, Confocal microscopy, Colorimetry, Detector arrays, Multiplexing, Imaging systems, Spectroscopy, Light sources, Prisms, RGB color model

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Proceedings Article | 14 March 2013 Paper

Efficient and precise simulation of multiple Mie scattering events using GPGPUs

Simon Streicher, Ronald Kampmann, Stefan Sinzinger, Oliver Kalthoff

Proceedings Volume 8619, 86190K (2013) https://doi.org/10.1117/12.2003799

KEYWORDS: Scattering, Photons, Mie scattering, Electromagnetic scattering, Monte Carlo methods, Wave propagation, Radio propagation, Electromagnetic radiation, Particles, Computer simulations

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Proceedings Article | 13 March 2013 Paper

Tunable cylindrical microlenses based on aluminum nitride membranes

Steffen Leopold, Daniel Paetz, Fabian Knoebber, Oliver Ambacher, Stefan Sinzinger, Martin Hoffmann

Proceedings Volume 8616, 861611 (2013) https://doi.org/10.1117/12.2005131

KEYWORDS: Aluminum nitride, Silicon, Cylindrical lenses, Finite element methods, Silica, Lenses, Micro optics, Silicon films, Deep reactive ion etching, Beam shaping

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Proceedings Article | 5 March 2013 Paper

Optimized systems for energy efficient optical tweezing

R. Kampmann, R. Kleindienst, A. Grewe, Elisabeth Bürger, A. Oeder, S. Sinzinger

Proceedings Volume 8637, 863714 (2013) https://doi.org/10.1117/12.2004287

KEYWORDS: Axicons, Mirrors, Particles, Optical tweezers, Photons, Optical design, Geometrical optics, Optics manufacturing, Scattering, Refraction

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Proceedings Article | 5 March 2013 Paper

Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors

R. Kleindienst, V. Cimalla, M. Eickhoff, A. Grewe, K. Holc, J. Schätzle, U. Schwarz, J. Teubert, S. Sinzinger

Proceedings Volume 8613, 861315 (2013) https://doi.org/10.1117/12.2002411

KEYWORDS: Sensors, Optical design, Oxygen, Beam shaping, Polymethylmethacrylate, Semiconductor lasers, Fabrication, Data conversion, Mirrors, Nanowires

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Proceedings Article | 18 December 2012 Paper

Chromatic information coding in optical systems for hyperspectral imaging and chromatic confocal sensing

M. Hillenbrand, A. Grewe, M. Bichra, B. Mitschunas, R. Kirner, R. Weiß, S. Sinzinger

Proceedings Volume 8550, 85500D (2012) https://doi.org/10.1117/12.981147

KEYWORDS: Colorimetry, Confocal microscopy, Imaging systems, Sensors, Chromatic aberrations, Hyperspectral imaging, Monochromatic aberrations, Spectral resolution, Point spread functions, Sensing systems

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Proceedings Article | 18 December 2012 Paper

Planar plano-convex microlens in silica using ICP-CVD and DRIE

E. Markweg, M. Hillenbrand, S. Sinzinger, M. Hoffmann

Proceedings Volume 8550, 85500T (2012) https://doi.org/10.1117/12.981266

KEYWORDS: Refractive index, Collimation, Microlens, GRIN lenses, Silicon, Deep reactive ion etching, Beam shaping, Silica, Geometrical optics, Optical components

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Proceedings Article | 27 September 2011 Paper

Computer-aided manufacturing for freeform optical elements by ultraprecision micromilling

Sebastian Stoebenau, Roman Kleindienst, Meike Hofmann, Stefan Sinzinger

Proceedings Volume 8126, 812614 (2011) https://doi.org/10.1117/12.893750

KEYWORDS: Computer programming, Optical components, Micro cutting, Beam shaping, Chemical elements, Optics manufacturing, Data modeling, Freeform optics, Spindles, Solids

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Proceedings Article | 7 September 2011 Paper

Synthetic design and integrated fabrication of multifunctional hybrid beam shapers

Roman Kleindienst, Ronald Kampmann, Sebastian Stoebenau, Stefan Sinzinger

Proceedings Volume 8130, 81300E (2011) https://doi.org/10.1117/12.893768

KEYWORDS: Beam shaping, Reflectivity, Diffraction, Laser ablation, Ray tracing, Optical simulations, Optical components, Picosecond phenomena, Diffraction gratings, Beam splitters

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Proceedings Article | 11 May 2011 Paper

Digital holography and phase retrieval: a theoretical investigation

Damien Kelly, Thomas Meinecke, Nail Sabitov, Stefan Sinzinger, John Sheridan

Proceedings Volume 8074, 80740C (2011) https://doi.org/10.1117/12.892010

KEYWORDS: Digital holography, Cameras, Holograms, Phase retrieval, Fourier transforms, Spatial frequencies, Holography, Reconstruction algorithms, 3D image reconstruction, Imaging systems

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Proceedings Article | 14 February 2011 Paper

Tunable refractive beam steering using aluminum nitride thermal actuators

S. Leopold, D. Paetz, F. Knoebber, T. Polster, O. Ambacher, S. Sinzinger, M. Hoffmann

Proceedings Volume 7931, 79310B (2011) https://doi.org/10.1117/12.874826

KEYWORDS: Aluminum nitride, Actuators, Silicon, Beam steering, Thin films, Eye, Prisms, Numerical analysis, Image quality, Silica

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Proceedings Article | 13 May 2010 Paper

Highly integrated optical microsystem for particle concentration measurement

Meike Hofmann, Xuan Ma, Jan Schneider, Stefan Sinzinger

Proceedings Volume 7716, 77160T (2010) https://doi.org/10.1117/12.854219

KEYWORDS: Particles, Light sources, Sensors, Diffraction gratings, Vertical cavity surface emitting lasers, Light scattering, Integrated optics, Interferometers, System integration, Scattering

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We present our research on integrated optical Talbot interferometers for particle mass concentration measurements. For optimum integration of highly sensitive optical measurement systems we apply a planar emitter-receiver-unit with a vertical cavity surface emitting laser (VCSEL) at 850 nm as light source. The optical system is integrated into a planar transparent PMMA (polymethylmethacrylate) substrate. We suggest a planar integrated free-space optical system for monitoring the particle mass concentration of polydisperse suspensions. Thorough simulations of the optical sensor show that for the required regime of particle concentration and particle size distribution (PSD) turbidity measurements where the attenuation of a light beam is evaluated for example at different wavelengths do not provide the required measurement precision. We therefore propose a system where the probe beam even though sent through the system is blocked before reaching the detector by an interferometric setup. The stray light originating from the particles is exploited for the measurement. For our application we focus on particles with sizes in the range 1 - 120 μm and particle mass concentrations in the range of 1-10 mg/L. In this case significant strength of the scattering signal only appears in small angles relative to the incident probe beam (forward scattering). The probe beam and the stray light thus overlap to a large extent. Our sensor concept is based on a monolithically integrated Talbot interferometer. Two properly aligned diffraction gratings are used to remove the primary beam. We use a stripe detector as second grating. The stray light causes perturbations within the formation of the self image of the grating. These perturbations are visualized as speckles on a detector and exploited for particle concentration measurements. The potential of the sensor concept is presented on the example of a modular Talbot interferometer using a HeNe laser at 633 nm to measure particle mass concentrations between 1 mg/L and 250 mg/L of Arizona test dust. We present the results of our investigations concerning the generation of Talbot self images in the planar configuration using a diverging multimode VCSEL light source. Furthermore we discuss the design and demonstrate the fabrication of a planar optical test system containing the integrated passive optical elements necessary for forming an integrated Talbot interferometer. Light source and sensor are positioned on a separate chip.

Proceedings Article | 13 May 2010 Paper

Integrated freespace optical fluorescence detector for micro fluidic applications

Martin Amberg, Sebastian Stoebenau, Stefan Sinzinger

Proceedings Volume 7716, 77160S (2010) https://doi.org/10.1117/12.854287

KEYWORDS: Luminescence, Sensors, Integrated optics, Microfluidics, Optical components, Free space optics, Signal detection, Micro cutting, System integration, Polymethylmethacrylate

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Proceedings Article | 13 May 2010 Paper

Tunable compound eye cameras

Daniel Pätz, Steffen Leopold, Fabian Knöbber, Stefan Sinzinger, Martin Hoffmann, Oliver Ambacher

Proceedings Volume 7716, 77160K (2010) https://doi.org/10.1117/12.854532

KEYWORDS: Aluminum nitride, Chemical elements, Eye, Cameras, Actuators, Microlens, Thin films, Image quality, Prisms, Silicon films

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Proceedings Article | 22 August 2009 Paper

Ultraprecision machining techniques for the fabrication of freeform surfaces in highly integrated optical microsystems

Sebastian Stoebenau, Stefan Sinzinger

Proceedings Volume 7426, 742608 (2009) https://doi.org/10.1117/12.826538

KEYWORDS: Integrated optics, Micro cutting, Imaging systems, Optical components, Microsystems, Prisms, System integration, Fabrication, Diamond, Geometrical optics

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Proceedings Article | 22 August 2009 Paper

Simulation and analysis of the polishing process for aspheres

Andreas Kelm, Manuel Hänle, Rainer Boerret, Stefan Sinzinger

Proceedings Volume 7426, 74260F (2009) https://doi.org/10.1117/12.825067

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Spherical lenses, Shape analysis, Computer simulations, Process control, Polishing equipment, Optics manufacturing, Optical testing

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Proceedings Article | 17 June 2009 Paper

Measurement and simulation of striae in optical glass

H. Gross, M. Hofmann, R. Jedamzik, P. Hartmann, S. Sinzinger

Proceedings Volume 7389, 73891C (2009) https://doi.org/10.1117/12.827677

KEYWORDS: Glasses, Diffraction, Statistical modeling, Refractive index, Interferometry, Lamps, Light sources, Calibration, Statistical analysis, Cameras

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Proceedings Article | 25 September 2008 Paper

Modeling of the polishing process for aspheric optics

Andreas Kelm, Rainer Boerret, Stefan Sinzinger

Proceedings Volume 7102, 71020H (2008) https://doi.org/10.1117/12.796388

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Aspheric optics, Manufacturing, Optics manufacturing, Glasses, Lenses, Computer simulations, Atrial fibrillation

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Proceedings Article | 14 May 2008 Paper

Ultraprecision micromilling of freeform optical elements for planar microoptical systems integration

Sebastian Stoebenau, Martin Amberg, Stefan Sinzinger

Proceedings Volume 6992, 699207 (2008) https://doi.org/10.1117/12.780310

KEYWORDS: Optical components, Integrated optics, System integration, Aberration correction, Geometrical optics, Micro cutting, Imaging systems, Reflectivity, Chemical elements, Tolerancing

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Proceedings Article | 12 September 2007 Paper

Fly’s eye condenser based on chirped microlens arrays

Frank Wippermann, Uwe-D. Zeitner, Peter Dannberg, Andreas Bräuer, Stefan Sinzinger

Proceedings Volume 6663, 666309 (2007) https://doi.org/10.1117/12.736802

KEYWORDS: Microlens array, Microlens, Refraction, Eye, Staring arrays, Homogenization, Modulation, Speckle pattern, Photoresist materials, Channel projecting optics

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Proceedings Article | 22 January 2007 Paper

Improved homogenization of fly's eye condenser setups under coherent illumination using chirped microlens arrays

F. Wippermann, P. Dannberg, A. Bräuer, S. Sinzinger

Proceedings Volume 6466, 64660R (2007) https://doi.org/10.1117/12.700127

KEYWORDS: Eye, Photoresist materials, Microlens array, Microlens, Homogenization, Modulation, Speckle pattern, Prototyping, Lithography, Beam shaping

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Proceedings Article | 31 August 2006 Paper

Fabrication technologies for chirped refractive microlens arrays

F. Wippermann, D. Radtke, U. Zeitner, J. Duparré, A. Tünnermann, M. Amberg, S. Sinzinger, C. Reinhardt, A. Ovsianikov, B. Chichkov

Proceedings Volume 6288, 62880O (2006) https://doi.org/10.1117/12.680585

KEYWORDS: Photomasks, Lithography, Two photon polymerization, Microlens array, Photoresist materials, Lenses, Prisms, Diffraction, Microlens, Surface roughness

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Proceedings Article | 15 October 2005 Paper

Design considerations for integrated microoptical systems combining refractive and diffractive optical components

Martin Amberg, Beate Mitschunas, Daniel Pätz, Stefan Sinzinger

Proceedings Volume 5962, 59622B (2005) https://doi.org/10.1117/12.625182

KEYWORDS: Imaging systems, Optical components, Prisms, Diffraction, Diffractive optical elements, Signal to noise ratio, System integration, Reflection, Optical design, Coating

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SPIE Journal Paper | 1 October 2004

Phase-only optical decryption in a planar integrated micro-optics system

Vincent Daria, Peter John Rodrigo, Stefan Sinzinger, Jesper Glückstad

OE, Vol. 43, Issue 10, (October 2004) https://doi.org/10.1117/12.10.1117/1.1782613

KEYWORDS: Visualization, Integrated optics, Spatial light modulators, Micro optics, System integration, Phase contrast, Optical components, Image encryption, Phase shift keying, Phase only filters

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Proceedings Article | 19 November 2003 Paper

Performance of the generalized phase contrast method implemented in planar-integrated micro-optics

Vincent Daria, Jesper Gluckstad, Rene Eriksen, Stefan Sinzinger

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.525526

KEYWORDS: Phase contrast, Micro optics, Diffractive optical elements, Lithography, Photomasks, Silica, Image resolution, Binary data, Phase only filters, Visualization

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Proceedings Article | 13 December 2001 Paper

Systems engineering for planar-integrated free-space optics

Stefan Sinzinger

Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450447

KEYWORDS: Integrated optics, Free space optics, System integration, Optical correlators, Microlens, Computer aided design, Lithography, Photomasks, Optical interconnects, Optical components

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Proceedings Article | 24 May 2000 Paper

Optoelectronic multichip module based on planar-integrated free-space optics

Matthias Gruber, Stefan Sinzinger, Juergen Jahns

Proceedings Volume 4089, (2000) https://doi.org/10.1117/12.386873

KEYWORDS: Free space optics, Optoelectronics, Imaging systems, Vertical cavity surface emitting lasers, Sensors, Microlens, Optical interconnects, Computer architecture, Fluctuations and noise, Binary data

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Proceedings Article | 22 May 1998 Paper

Design of an optoelectronic VLSI/parallel-fiber bus

Paul Lukowicz, Stefan Sinzinger, Karlheinz Dunkel, Hans-Dieter Bauer

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308945

KEYWORDS: Transmitters, Optoelectronics, Very large scale integration, Receivers, Interfaces, Free space optics, Connectors, Computing systems, Logic, Fiber couplers

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Proceedings Article | 22 May 1998 Paper

Planar optics as the technological platform for optical interconnects

Stefan Sinzinger

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308969

KEYWORDS: Free space optics, Integrated optics, Optical interconnects, Optical correlators, Lithography, Optoelectronics, Fabrication, Glasses, Free space, Vertical cavity surface emitting lasers

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Proceedings Article | 20 April 1998 Paper

Light efficient parallel interconnect using integrated planar free-space optics and vertical-cavity surface-emitting laser diodes

Juergen Jahns, Christiane Gimkiewicz, Stefan Sinzinger

Proceedings Volume 3286, (1998) https://doi.org/10.1117/12.305468

KEYWORDS: Vertical cavity surface emitting lasers, Free space optics, Geometrical optics, Integrated optics, Lithography, Optical interconnects, Channel projecting optics, Analog electronics, Diodes, Mirrors

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Proceedings Article | 7 April 1998 Paper

Sensing applications of diffractive optics with broadband illumination

Juergen Jahns, Victor Arrizon, D. Hagedorn, Susanne Kinne, Stefan Sinzinger

Proceedings Volume 3279, (1998) https://doi.org/10.1117/12.304421

KEYWORDS: Free space optics, Chemical elements, Light emitting diodes, Spectroscopy, Optical filters, Optical components, Process control, Lithography, Environmental monitoring, Sensors

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Proceedings Article | 4 April 1997 Paper

Confocal imaging with diffractive optics and broadband light sources

Stefan Sinzinger, Victor Arrizon, Juergen Jahns

Proceedings Volume 3002, (1997) https://doi.org/10.1117/12.271040

KEYWORDS: Confocal microscopy, Light sources, Sensors, Spectroscopy, Free space optics, Integrated optics, Geometrical optics, Imaging systems, Optical design, Microscopy

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Proceedings Article | 12 July 1993 Paper

Micro-optical setup with microlenses and microprisms based on refractive optics

Karl-Heinz Brenner, Michael Frank, Maria Kufner, Stefan Kufner, Joerg Moisel, A. Mueller, Stefan Sinzinger, Markus Testorf, Jost Goettert, Juergen Mohr

Proceedings Volume 1806, (1993) https://doi.org/10.1117/12.147834

KEYWORDS: Prisms, Microlens, Lithography, Image acquisition, Optical computing, Polymethylmethacrylate, Imaging systems, Glasses, Etching, Optical imaging

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