Prof. Stefan Sinzinger
Professor Optical Engg at Technische Univ Ilmenau
SPIE Involvement:
Editorial Board Member: Journal of Optical Microsystems | Author
Publications (53)

Proceedings Article | 9 March 2020 Presentation
Proc. SPIE. 11287, Photonic Instrumentation Engineering VII
KEYWORDS: Diffractive optical elements, Hyperspectral imaging, Compressed sensing, 3D acquisition, Optical filters, Diffraction, Remote sensing, Agriculture, Geology, Defense and security

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Wavefronts, Image registration, Photovoltaics, Metrology, Data integration, Manufacturing, Phase measurement, Error analysis, Sensors, Freeform optics

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Lithography, Sensors, Silicon, Nanofabrication, Laser processing, Photoresist materials, Interferometers, Scanning probe lithography, Optical lithography, Absorption

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Sensors, Ultraviolet radiation, Nanoimprint lithography, Silicon, Nanostructures, Lithography, Photoresist processing, Scanning electron microscopy, Fabrication, Optical sensors

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Sensors, Confocal microscopy, Laser scanners, Laser processing, Fiber coupled lasers

Showing 5 of 53 publications
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