Dr. Stefan Spratte
Product Manager at Lambda Physik AG
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Optical amplifiers, Optical lithography, Oscillators, Amplifiers, Excimer lasers, Molybdenum, Pulsed laser operation, Optics manufacturing, Laser systems engineering

Proceedings Article | 10 November 2003 Paper
Proc. SPIE. 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Lithography, Optical lithography, Silica, Quartz, Polymers, Laser applications, Telecommunications, Excimer lasers, Micromachining, Fluorine

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Optical components, Optical lithography, Oscillators, Calibration, Laser development, Laser stabilization, Excimer lasers, Laser optics, Signal detection, Pulsed laser operation

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Optical lithography, High power lasers, Reliability, Laser development, Laser resonators, Laser stabilization, Excimer lasers, Laser optics, Pulsed laser operation

Proceedings Article | 30 July 2002 Paper
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Polarization, High power lasers, Laser development, Laser stabilization, Spatial coherence, Laser metrology, Vacuum ultraviolet, Pulsed laser operation, Prototyping

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top