Dr. Stephan Beer Profile

Dr. Stephan Beer

at CSEM

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 3 November 2011 Paper

Parallel approach to MEMS and micro-optics interferometric testing

M. Kujawińska, S. Beer, K. Gastinger, C. Gorecki, K. Haugholt, M. Józwik, P. Lambelet, R. Paris, A. Styk, U. Zeitner

Proceedings Volume 8011, 80117O (2011) https://doi.org/10.1117/12.903256

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Diffractive optical elements, Wafer-level optics, Imaging systems, Interferometry, Lithium, Microelectromechanical systems, Micro optics

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Proceedings Article | 2 August 2010 Paper

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment

M. Kujawinska, M. Józwik, A. Styk, U. Zeitner, A. Røyset, S. Beer, R. Moosburger, C. Gorecki, K. Gastinger

Proceedings Volume 7791, 779103 (2010) https://doi.org/10.1117/12.862170

KEYWORDS: Interferometers, Semiconducting wafers, Cameras, Lithium, Imaging systems, Inspection, Diffraction gratings, Demodulation, Signal processing, Wafer-level optics

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Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

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Proceedings Article | 17 June 2009 Paper

Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Kay Gastinger, Karl Henrik Haugholt, Malgorzata Kujawinska, Michal Jozwik, Christoph Schaeffel, Stephan Beer

Proceedings Volume 7389, 73891J (2009) https://doi.org/10.1117/12.828162

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Cameras, Imaging systems, Beam splitters, Glasses, Signal detection, Mirrors, Interferometry

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Proceedings Article | 16 April 2004 Paper

Smart pixels for real-time optical coherence tomography

Stephan Beer, Philipp Zeller, Nicolas Blanc, Felix Lustenberger, Peter Seitz

Proceedings Volume 5302, (2004) https://doi.org/10.1117/12.525698

KEYWORDS: Optical coherence tomography, Sensors, Signal to noise ratio, Demodulation, Signal detection, Mirrors, Photons, Image sensors, 3D image processing, Modulation

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Showing 5 of 6 publications

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