Mr. Stephen E. Gibbons Profile

Stephen E. Gibbons

at Brewer Science Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 26 March 2008 Paper

Anti-reflective coating for multipatterning lithography

Douglas Guerrero, Steve Gibbons, Joyce Lowes, Ramil Mercado

Proceedings Volume 6923, 69230X (2008) https://doi.org/10.1117/12.772827

KEYWORDS: Photoresist processing, Etching, Image processing, Optical lithography, Semiconducting wafers, Oxygen, Lithography, Printing, Argon, Scanning electron microscopy

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Proceedings Article | 2 June 2003 Paper

Development of a polymer etch rate monitor: design, characterization, and application

Heping Wang, Terry Toddy, Stephen Gibbons, Trisha May

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485000

KEYWORDS: Polymers, Polymer thin films, Signal processing, Etching, Coating, Resistance, Scanning electron microscopy, Silicon, Diffusion, Interfaces

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Proceedings Article | 24 August 2001 Paper

Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs)

James Meador, Xie Shao, Mandar Bhave, Chris Cox, John Thompson, Debra Thomas, Stephen Gibbons, Ashley Farnsworth, Michael Rich

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436918

KEYWORDS: Polymers, Photoresist materials, Reflectivity, Etching, Plasma etching, Lithography, Silicon, Scanning electron microscopy, Semiconducting wafers, Ions

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