Dr. Stephen Michael Kuebler Profile

Dr. Stephen Michael Kuebler

Associate Professor of Chemistry and Optics at Univ of Central Florida

SPIE Involvement:

Conference Program Committee | Editorial Board Member: Journal of Optical Microsystems | Author

Area of Expertise:

Photopolymerization , Microfabrication , 3D lithography , Nanofabrication , Nanophotonics , Laser patterning

Websites:

Company Website

Publications (32)

Proceedings Article | 12 June 2023 Presentation + Paper

Laser particle sizer for lunar plume-surface interaction studies

Robert Peale, Dinidu Hathnagoda, Cameron Kelley, Chris Fredricksen, Christian Walker, Camilo Posada, Julia Zorovich, Coleman Cariker, Nagendra Dhakal, Javier Gonzalez, Pooria Golvari, Stephen Kuebler, Philip Metzger, Addie Dove

Proceedings Volume 12537, 125370A (2023) https://doi.org/10.1117/12.2663930

KEYWORDS: Particles, Laser beam propagation, Refractive index, Minerals, Laser scattering, Mie scattering

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Proceedings Article | 30 June 2022 Open Access

Curricular structure for teaching ethical and professional conduct in optics and photonics

Stephen Kuebler, Jonathan Beever, Laurie Pinkert

Proceedings Volume 12297, 122972D (2022) https://doi.org/10.1117/12.2635587

KEYWORDS: Photonics, Standards development, Scanning transmission electron microscopy, Physics, Education and training, Video, Safety, Reflectivity, Ranging, Optical communications

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Proceedings Article | 25 May 2022 Presentation + Paper

Volumetric microfabrication of helical structures for industrial applications

He Cheng, Pooria Golvari, Chun Xia, Mingman Sun, Meng Zhang, Stephen Kuebler, Xiaoming Yu

Proceedings Volume 12054, 1205409 (2022) https://doi.org/10.1117/12.2614703

KEYWORDS: Spatial light modulators, Computer generated holography, Microfabrication, Bessel beams, Metamaterials, Free space optics

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Proceedings Article | 5 March 2022 Presentation + Paper

Wide-band self-collimation in low refractive index hexagonal lattice

Chun Xia, Stephen Kuebler, Noel Martinez, Manuel Martinez, Raymond Rumpf, Jimmy Touma

Proceedings Volume 12010, 1201004 (2022) https://doi.org/10.1117/12.2608627

KEYWORDS: Refractive index, Photonic crystals, Solids, Finite-difference time-domain method, Electroluminescence, Visualization, Integrated photonics, Gaussian beams, Dispersion, Stars

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Proceedings Article | 5 March 2022 Paper

Rapid microfabrication of helical structures for industrial applications

He Cheng, Pooria Golvari, Chun Xia, Mingman Sun, Meng Zhang, Stephen Kuebler, Xiaoming Yu

Proceedings Volume 12012, 1201205 (2022) https://doi.org/10.1117/12.2608940

KEYWORDS: Spatial light modulators, Microfabrication, Microfluidics, Metamaterials, Bessel beams, Polymerization

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SPIE Journal Paper | 6 May 2021 Open Access

Gentle method for removing metal and restoring function after scanning electron microscopy

Rashi Sharma, Jennefir L. Digaum, Hannah West, Casey Schwarz, Stephen Kuebler

JM3, Vol. 20, Issue 02, 023601, (May 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.2.023601

KEYWORDS: Etching, Metals, Scanning electron microscopy, Coating, 3D microstructuring, Polymers, Gold, Transmittance, Sputter deposition, Optical testing

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SPIE Journal Paper | 26 January 2021 Open Access

Structurally and morphologically engineered chalcogenide materials for optical and photonic devices

Casey Schwarz, Stephen Kuebler, Clara Rivero-Baleine, Brandon Triplett, Myungkoo Kang, Quentin Altemose, Cesar Blanco, Kathleen Richardson, Qingyang Du, Skylar Deckoff-Jones, Juejun Hu, Yifei Zhang, Ying Pan, Carlos Ríos

JOM, Vol. 1, Issue 01, 013502, (January 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.1.013502

KEYWORDS: Tellurium, Selenium, Arsenic, Antimony, Etching, Germanium, Crystals, Optical lithography, GRIN lenses, Chalcogenides

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Proceedings Article | 26 March 2019 Presentation + Paper

3D printing functional nano-photonic devices by multi-photon lithography

Stephen Kuebler, Chun Xia, Geng Yang, Rashi Sharma, Noel Martinez, Raymond Rumpf, Jimmy Touma

Proceedings Volume 10958, 1095806 (2019) https://doi.org/10.1117/12.2518030

KEYWORDS: Polymers, 3D printing, Nanophotonics, Multiphoton lithography, Lithography, Photopolymers, Control systems, Integrated photonics, Absorption, Polymerization

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Proceedings Article | 27 February 2019 Presentation + Paper

Fabrication of functional nanophotonic devices by multiphoton lithography

Stephen Kuebler, Chun Xia, Rashi Sharma, Jennefir Digaum, Noel Martinez, Cesar Valle, Raymond Rumpf

Proceedings Volume 10915, 1091502 (2019) https://doi.org/10.1117/12.2508675

KEYWORDS: Photonic crystals, Polymers, Multiphoton lithography, Polymerization, Lithography, Photonics, Optical fibers, Photopolymerization, Microfabrication, Nanolithography

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Proceedings Article | 8 May 2018 Presentation + Paper

Advances in infrared GRIN: a review of novel materials towards components and devices

Kathleen Richardson, Myungkoo Kang, Laura Sisken, Anupama Yadav, Cesar Blanco, Michael Antia, Spencer Novak, Charmayne Smith, Andy Buff, Antoine Lepicard, Marc Dussauze, Casey Schwarz, Stephen Kuebler, Chris Grabill, Carlo Pantano, Theresa Mayer, Alexej Pogrebnyakov, Clara Rivero-Baleine, Andrew Kirk, Samantha Mensah, Megan Driggers, Juejun Hu, Pao-Tai Lin, Anuradha Agarwal, Cheng Li, Weiwei Deng

Proceedings Volume 10627, 106270A (2018) https://doi.org/10.1117/12.2304608

KEYWORDS: Glasses, Crystals, Refractive index, GRIN lenses, Infrared radiation, Chalcogenide glass, Ceramics, Heat treatments, Nanocomposites, Ions

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Proceedings Article | 8 May 2018 Presentation + Paper

Optical and crystal growth studies of ZnO-Bi2O3-B2O3 glass

C. Schwarz, M. Kang, C. Pantano, K. Richardson, C. Rivero-Baleine, S. Kuebler, C. Grabill, J. Rice, Q. Altemose, K. Raichle, B. Schnable, I. Wietecha-Reiman, E. Haldeman

Proceedings Volume 10627, 106270O (2018) https://doi.org/10.1117/12.2304446

KEYWORDS: Crystals, Heat treatments, Glasses, Temperature metrology, Bismuth, X-ray diffraction, Polishing, Nanocrystals, Crystal optics, Crystallography

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Proceedings Article | 14 March 2016 Paper

Beam-bending in spatially variant photonic crystals at telecommunications wavelengths

Jennefir Digaum, Rashi Sharma, Daniel Batista, Javier Pazos, Raymond Rumpf, Stephen Kuebler

Proceedings Volume 9759, 975911 (2016) https://doi.org/10.1117/12.2213276

KEYWORDS: Waveguides, Photonic crystals, Scanning electron microscopy, Neodymium, Lithography, Integrated optics, Telecommunications, Geometrical optics, Multiphoton lithography, Metals

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Proceedings Article | 14 March 2016 Paper

Multi-photon lithography of 3D micro-structures in As2S3 and Ge5(As2Se3)95 chalcogenide glasses

Casey Schwarz, Shreya Labh, Jayk Barker, Ryan Sapia, Gerald Richardson, Clara Rivero-Baleine, Benn Gleason, Kathleen Richardson, Alexej Pogrebnyakov, Theresa Mayer, Stephen Kuebler

Proceedings Volume 9759, 975916 (2016) https://doi.org/10.1117/12.2213030

KEYWORDS: Multiphoton lithography, Lithography, Chalcogenide glass, Arsenic, Refractive index, Etching, Germanium, Selenium, Refraction, Scanning electron microscopy

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Proceedings Article | 13 March 2015 Paper

Fabrication and characterization of micro-structures created by direct laser writing in multi-layered chalcogenide glasses

Casey Schwarz, Chris Grabill, Benn Gleason, Gerald Richardson, Anna Lewis, Aadit Vyas, Clara Rivero-Baleine, Kathleen Richardson, Alexej Pogrebnyakov, Theresa Mayer, Stephen Kuebler

Proceedings Volume 9374, 937403 (2015) https://doi.org/10.1117/12.2077629

KEYWORDS: Etching, Raman spectroscopy, Silicon, Arsenic, Multiphoton lithography, Ultraviolet radiation, Nanolithography, Silicon films, Antireflective coatings, Refractive index

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Proceedings Article | 27 February 2015 Paper

Polarization sensitive beam bending using a spatially variant photonic crystal

Jennefir Digaum, Javier Pazos, Raymond Rumpf, Jeff Chiles, Sasan Fathpour, Jeremy Thomas, Stephen Kuebler

Proceedings Volume 9371, 93710I (2015) https://doi.org/10.1117/12.2076829

KEYWORDS: Photonic crystals, Optical fibers, Polarization, Scanning electron microscopy, Dielectric polarization, Control systems, Waveguides, Dispersion, Glasses, Geometrical optics

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Proceedings Article | 7 March 2014 Paper

Interdependence of reabsorption and internal energy losses in luminescent solar concentrators

Jennefir Digaum, Stephen Kuebler

Proceedings Volume 8981, 89810E (2014) https://doi.org/10.1117/12.2036838

KEYWORDS: Quantum efficiency, Absorption, Solar cells, Solar energy, Energy efficiency, Photovoltaics, Rhodamine B, Solar concentrators, Interfaces, Refractive index

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Proceedings Article | 7 March 2014 Paper

Processing and properties of arsenic trisulfide chalcogenide glasses for direct laser writing of 3D microstructures

Casey Schwarz, Henry Williams, Chris Grabill, Anna Lewis, Stephen Kuebler, Benn Gleason, Kathleen Richardson, Alexej Pogrebnyakov, Theresa Mayer, Christina Drake, Clara Rivero-Baleine

Proceedings Volume 8974, 89740P (2014) https://doi.org/10.1117/12.2042809

KEYWORDS: Etching, Ultraviolet radiation, Raman spectroscopy, Refractive index, Arsenic, Multiphoton lithography, Ellipsometry, Chalcogenide glass, Photonics, Solids

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Proceedings Article | 24 August 2009 Open Access

Transverse and axial beam shaping in the non-paraxial domain

Stephen Kuebler, Toufic Jabbour

Proceedings Volume 7430, 743002 (2009) https://doi.org/10.1117/12.827475

KEYWORDS: Diffractive optical elements, Beam shaping, Diffraction, Point spread functions, Super resolution, Particle swarm optimization, Detection and tracking algorithms, Particles, Algorithm development, Polarization

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Proceedings Article | 20 February 2008 Paper

Axial field engineering in the nonparaxial domain

Toufic Jabbour, Stephen Kuebler

Proceedings Volume 6861, 68610P (2008) https://doi.org/10.1117/12.761977

KEYWORDS: Diffractive optical elements, Point spread functions, Diffraction, Super resolution, Binary data, Wave propagation, Spherical lenses, 3D acquisition, 3D image processing, Algorithm development

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Proceedings Article | 12 February 2008 Paper

Preparation of metallo-dielectric photonic crystals by multi-photon direct laser writing

Stephen Kuebler, Amir Tal, Yun-Sheng Chen

Proceedings Volume 6901, 69010Z (2008) https://doi.org/10.1117/12.760826

KEYWORDS: Copper, Reflectivity, Polymers, Photonic crystals, Mid-IR, Multiphoton lithography, Metals, Plating, Plasma etching, FT-IR spectroscopy

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Proceedings Article | 6 February 2008 Paper

Design of axially super-resolving phase pupil filter for high-numerical aperture applications

Toufic Jabbour, Stephen Kuebler

Proceedings Volume 6883, 688310 (2008) https://doi.org/10.1117/12.761022

KEYWORDS: Diffractive optical elements, Point spread functions, Diffraction, Etching, Super resolution, Binary data, Tolerancing, Error analysis, Surface roughness, Fabrication

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Proceedings Article | 6 February 2008 Paper

Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization

Stephen Kuebler, Yun-Sheng Chen, Amir Tal

Proceedings Volume 6883, 68830L (2008) https://doi.org/10.1117/12.760824

KEYWORDS: Polymers, Reflectivity, Silver, Photonic crystals, Copper, Metals, Photonics, Scanning electron microscopy, Microfabrication, FT-IR spectroscopy

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Proceedings Article | 7 March 2007 Paper

Silvered three-dimensional polymeric photonic crystals having a large mid-infrared stop band

Stephen Kuebler, Amir Tal, Yun-Sheng Chen

Proceedings Volume 6462, 646213 (2007) https://doi.org/10.1117/12.702168

KEYWORDS: Photonic crystals, Polymers, Silver, Metals, Scanning electron microscopy, Reflectivity, FT-IR spectroscopy, Liquids, Dielectrics, Microfabrication

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Proceedings Article | 23 January 2006 Paper

Effect of two- and three-zone phase masks on the axial and transverse intensity distribution under high numerical aperture focusing

Stephen Kuebler, Toufic Jabbour

Proceedings Volume 6110, 61100B (2006) https://doi.org/10.1117/12.647618

KEYWORDS: Amplifiers, Point spread functions, Super resolution, Diffraction, Diffractive optical elements, Microfabrication, Transmittance, Optical filters, Phase only filters, Modulation

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Proceedings Article | 22 January 2005 Paper

CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication

Ivan Divliansky, Gregory Weaver, Michael Petrovich, Toufic Jabbour, Hubert Seigneur, Caleb Parnell-Lampen, Amy Thompson, Kevin Belfield, Stephen Kuebler

Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.601187

KEYWORDS: Computer aided design, Microfabrication, Polymers, Microelectromechanical systems, Microfluidics, Computing systems, Optical lithography, Control systems, Nanofabrication, Human-machine interfaces

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Proceedings Article | 8 October 2004 Paper

Two-photon microfabrication of switchable diffractive optical devices

Stephen Kuebler, K. Mohanalingam, Joseph Perry

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.595871

KEYWORDS: Liquid crystals, Diffraction, Microfabrication, Diffraction gratings, Polymers, Optical components, Switching, Modulation, Optical lithography, Polymerization

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Proceedings Article | 29 December 2003 Paper

High-sensitivity material systems for two-photon three dimensional microfabrication

Stephen Kuebler, Joseph Perry, Seth Marder, Christopher Ober, Kevin Braun, Tianyue Yu, Wenhui Zhou

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.532614

KEYWORDS: Microfabrication, Molecules, Absorption, Polymerization, Chemically amplified resists, Chromophores, Chemistry, Lithography, Optical lithography, 3D image processing

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Proceedings Article | 16 September 2003 Paper

Information storage and retrieval using macromolecules as storage media

Masud Mansuripur, Pramod Khulbe, Stephen Kuebler, Joseph Perry, M. Giridhar, James Erwin, Kibyung Seong, Seth Marder, Nasser Peyghambarian

Proceedings Volume 5069, (2003) https://doi.org/10.1117/12.533057

KEYWORDS: Molecules, Data storage, Macromolecules, Particles, Electrodes, Binary data, Glasses, Liquids, Optical spheres, Optical storage

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Proceedings Article | 4 November 2002 Paper

One- and two-photon induced growth of ligand-coated nanoparticles for 2D and 3D metal patterning

Francesco Stellacci, Christina Bauer, Timo Meyer-Friedrichsen, Wim Wenseleers, Valerie Alain, Stephen Kuebler, Stephanie Pond, Yadong Zhang, Seth Marder, Joseph Perry

Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.453771

KEYWORDS: Metals, Nanoparticles, Silver, Polymers, Magnesium, Composites, Nanocomposites, Electron beam lithography, Particles, Absorption

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Proceedings Article | 4 November 2002 Paper

High-sensitivity two-photon photoacid generator for three-dimensional microfabrication

Stephen Kuebler, Kevin Braun, Wenhui Zhou, Tianyue Yu, J. Kevin Cammack, Christopher Ober, Seth Marder, Joseph Perry

Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.453776

KEYWORDS: Polymerization, Microfabrication, Absorption, Molecules, Chromophores, Solids, Luminescence, Laser damage threshold, Quantum efficiency, Microelectromechanical systems

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Proceedings Article | 17 April 2000 Paper

Three-dimensional microfabrication using two-photon-activated chemistry

Stephen Kuebler, Brian Cumpston, Sundaravel Ananthavel, Stephen Barlow, Jeffrey Ehrlich, L. Erskine, Ahmed Heikal, D. McCord-Maughon, J. Qin, Harold Roeckel, Maria Cristina Rumi, Seth Marder, Joseph Perry

Proceedings Volume 3937, (2000) https://doi.org/10.1117/12.382799

KEYWORDS: Polymerization, Absorption, Chromophores, Microfabrication, Ultraviolet radiation, 3D optical data storage, Luminescence, Polymers, 3D image processing, Scanning electron microscopy

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Proceedings Article | 1 September 1998 Paper

Three-dimensional microfabrication using two-photon polymerization

Brian Cumpston, Jeffrey Ehrlich, Stephen Kuebler, Matthew Lipson, Seth Marder, D. McCord-Maughon, Joseph Perry, Harold Roeckel, Maria Cristina Rumi

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324052

KEYWORDS: Absorption, Microfabrication, Chromophores, Two photon polymerization, Polymerization, Photopolymerization, Polymers, 3D optical data storage, Bridges, Microelectromechanical systems

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Photopolymerization initiated by the simultaneous absorption of two photons is unique in its ability to produce complex three-dimensional (3D) structures from a single, thick photopolymer film. Strong 3D confinement of the polymerization process is not possible in other polymer microfabrication techniques such as LIGA, rapid prototyping, and conventional photoresist technology. Two-photon polymerization also permits the fabrication of 3D structures and the definition of lithographic features on non-planar surfaces. We have developed a wide array of chromophores which hold great promise for 3D microfabrication, as well as other applications, such as two-photon fluorescence imaging and 3D optical data storage. These materials are based on a donor- (pi) -donor, donor-acceptor-donor, or acceptor-donor-acceptor structural motif. The magnitude of the two-photon absorption cross-section, (delta) , and the position of the two-photon absorption maximum, (lambda) ⁽²)_max, can be controlled by varying the length of the conjugated bridge and by varying the strength of the donor/acceptor groups. In this way, chromophores have been developed which exhibit strong two- photon absorption in the range of 500 - 975 nm, in some cases as high as 4400 X 10^-50 cm⁴ s/photon-molecule. In the case of donor-(pi) -donor structures, quantum-chemical calculations show that the large absorption cross-sections arise from the symmetric re-distribution of charge from the donor end-groups to the conjugated bridge, resulting in an electronic excited-state which is more delocalized than the ground state. For many of these molecules, two-photon excitation populates a state which is sufficiently reducing that a charge transfer reaction can occur with acrylate monomers. The efficiency of these processes can be described using Marcus theory. Under suitable conditions, such reactions can induce radical polymerization of acrylate resins. Polymerization rates have been measured, and we show that these two-photon chromophores display increased sensitivity and recording speed over conventional photoinitiators. Complex 3D structures can be fabricated in acrylate films doped with these chromophores using tightly focused near-infrared femtosecond laser pulses. A 3D periodic array of polymeric columns has been produced for use in photonic bandgap applications. Tapered waveguide structures for interconnecting disparate-sized optical components have been constructed. More traditional MEMS structures, such as cantilevers, have also been produced. Such structures may be useful for organic vapor sensors. The two-photon photopolymerization process can be extended to other material systems, such as metallic, ceramic, and composite materials, by templating the photopolymer structures.

Showing 5 of 32 publications

Conference Committee Involvement (23)

Novel Patterning Technologies 2024

26 February 2024 | San Jose, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII

28 January 2024 | San Francisco, California, United States

Novel Patterning Technologies 2023

27 February 2023 | San Jose, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI

29 January 2023 | San Francisco, California, United States

Novel Patterning Technologies 2022

25 April 2022 | San Jose, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV

23 January 2022 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV

6 March 2021 | Online Only, California, United States

Novel Patterning Technologies 2021

22 February 2021 | Online Only, California, United States

Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

24 February 2020 | San Jose, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII

2 February 2020 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII

3 February 2019 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI

28 January 2018 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X

29 January 2017 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX

14 February 2016 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII

8 February 2015 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

24 January 2012 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV

25 January 2011 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III

25 January 2010 | San Francisco, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II

26 January 2009 | San Jose, California, United States

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics

21 January 2008 | San Jose, California, United States

Micromachining Technology for Micro-optics and Nano-optics V

23 January 2007 | San Jose, California, United States

Micromachining Technology for Micro-Optics and Nano-Optics IV

23 January 2006 | San Jose, California, United States

Micromachining Technology for Microoptics and Nanooptics III

25 January 2005 | San Jose, California, United States

Showing 5 of 23 Conference Committees

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