Dr. Stephen Thoms
at Univ of Glasgow
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 October 2003 Paper
Proc. SPIE. 5220, Nanofabrication Technologies
KEYWORDS: Lithography, Electron beam lithography, Proteins, Optical lithography, Silica, Tissues, Polymers, Tissue engineering, Adhesives, Polymer thin films

Proceedings Article | 28 April 1999 Paper
Proc. SPIE. 3741, Lithography for Semiconductor Manufacturing
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymethylmethacrylate, Deep ultraviolet, Photoresist materials, Photoresist processing, Photoresist developing, Temperature metrology, Chemically amplified resists

Proceedings Article | 2 September 1992 Paper
Proc. SPIE. 1676, Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication
KEYWORDS: Nanostructures, Quantum wells, Scattering, Etching, Luminescence, Gallium arsenide, Diffusion, Quantum dots, Phonons, Raman scattering

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