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Steven C. Fanning
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Publications (1)
Proceedings Article | 6 May 2005 Paper
Polypyrrole/gold bilayer characterization
Steven Fanning, Yingkai Liu, Marc Christophersen, Matthias Duerkop, Elisabeth Smela, Benjamin Shapiro
Proceedings Volume 5759, (2005) https://doi.org/10.1117/12.599767
KEYWORDS: Gold, Actuators, Transducers, Microactuators, Microfabrication, Reactive ion etching, Etching, Biomedical optics, Surface micromachining, Electrodes
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